Metal Dielectric Film Reflective Polarization Beamsplitter Grating in 1053nm Waveband

A metal medium, polarization beam splitting technology, applied in the direction of diffraction grating, optics, optical elements, etc.

Active Publication Date: 2011-12-21
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As far as we know, no one has proposed a wide-spectrum, wide-angle spectrum metal dielectric film reflective polarization beam splitter grating for the 1053 nm band

Method used

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  • Metal Dielectric Film Reflective Polarization Beamsplitter Grating in 1053nm Waveband
  • Metal Dielectric Film Reflective Polarization Beamsplitter Grating in 1053nm Waveband
  • Metal Dielectric Film Reflective Polarization Beamsplitter Grating in 1053nm Waveband

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Embodiment

[0023] The reflective metal dielectric film polarization beam splitting grating is composed of a silver layer 6 plated sequentially on a quartz substrate, a high reflection film layer 5 composed of three dielectric films, and a rectangular grating 1. The material of the rectangular grating 1 is HfO 2 (refractive index 1.96), a period of 680.6 nm, a duty cycle of 0.2, and a thickness of 417 nm. The material of the middle layer 3 of the high reflection film layer 5 is HfO 2 , the thickness is 95nm, the inner layer 4 and outer layer 2 film material is SiO 2 (refractive index 1.45), and the thicknesses are 171 nm and 52 nm, respectively. The silver layer 6 has a thickness of 100 nm. Such as figure 2 When the incident angle is 50.7°, for 1053nm incident light, the -1 order diffraction efficiency of the grating TE and the 0 order diffraction efficiency of TM are both very high, greater than 98%, the 0 order diffraction efficiency of TE and the -1 order diffraction efficiency of ...

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Abstract

The invention relates to a metal dielectric film reflection polarization beam splitting grating for a waveband of 1,053 nanometers, which is characterized in that the metal dielectric film reflection polarization beam splitting grating is formed in a mode that a silver layer, a high reflection film layer and a rectangular grating are plated on a quartz substrate sequentially; the rectangular grating has a period of 680.6 nanometers and a duty cycle of 0.2; a grating etching depth is in the range of 374 to 476 nanometers; the thickness of the silver layer is 100 nanometers; an intermediate layer of the high reflection film layer is a high refractive index layer; and inner and outer layers of the high reflection film layer are low refractive index layers. The metal dielectric film reflection polarization beam splitting grating disclosed by the invention has high extinction ratio and diffraction efficiency and wider bandwidth and angular width, can be used for a high-power laser system and has a good polarization beam splitting effect.

Description

technical field [0001] The invention relates to a high-power laser system, in particular to a metal dielectric film polarization beam splitting grating, which is a metal dielectric film for a wavelength of 1053 nanometers based on the high laser damage threshold of the multilayer dielectric film and the wide reflection band of the metal film Reflective Polarizing Beamsplitter Grating. Background technique [0002] Laser has become a wonderful flower in natural science with its unique characteristics such as good monochromaticity, long coherence length, high directivity, and high energy density. High-power lasers are widely used in physics, chemistry, material science, life science, environmental science, energy science and other national economy and frontier scientific research; they are more important in national security fields such as space communication, laser radar and photoelectric countermeasures. application potential. The development of laser devices is insepa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18G02B27/28
Inventor 关贺元晋云霞刘世杰汪剑鹏范正修
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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