Method for preparing DLC (Diamond-Like Carbon) coating with high visible light transmissivity

A technology with high transmittance and visible light, applied in coating, metal material coating process, sputter plating, etc., can solve the problems of high transmittance of visible light, etc., achieve good transmittance, non-toxic tail gas, and preparation The effect of simple process

Inactive Publication Date: 2012-01-25
STARARC COATING TECH SUZHOU
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Problems solved by technology

[0003] The purpose of the present invention is to propose a method for preparing a DLC coating for extending the optical properties of the substrate, which solves the problem of high light transmittance of visible light, and at the same time has stable physical and chemical properties, high hardness, and realizes protection in the visible light band. The purpose of the optics

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  • Method for preparing DLC (Diamond-Like Carbon) coating with high visible light transmissivity
  • Method for preparing DLC (Diamond-Like Carbon) coating with high visible light transmissivity
  • Method for preparing DLC (Diamond-Like Carbon) coating with high visible light transmissivity

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Embodiment Construction

[0017] A preparation method of a visible light high transmittance DLC coating of the present embodiment, the coating is used to protect optical devices working in the visible light band, comprising the following steps:

[0018] Step 1: Evacuate the coating vacuum chamber to 5.0*10 -3 Vacuum degree above Pa;

[0019] Step 2: Use a heater to heat the coating vacuum chamber to 200-400° C., and keep it for at least 1 hour, and make the vacuum degree of the coating vacuum chamber reach 1.0×10 -3 Above Pa;

[0020] Step 3: Introduce argon gas into the coating vacuum chamber to make the vacuum degree in the vacuum chamber reach 1.0-20.0Pa,

[0021] Step 4: Turn on the ion beam power supply and start the ion cleaning process on the substrate surface; during the ion cleaning process, the bias voltage is 1000V, the working voltage applied to the ion beam is greater than 1000V, and the working current is between 50mA-150mA; the ion cleaning process The time is 5-30 minutes;

[0022] ...

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Abstract

The invention discloses a method for preparing a DLC (Diamond-Like Carbon) coating with high visible light transmissivity. The coating is used for protecting an optical device working in the visible light waveband, and the method comprises the ion cleaning technology and sputtering coating technology. In the two technological processes, the temperature of a vacuum room is always maintained between 200 DEG C and 400 DEG C. The invention has the main advantages that the coating method adopts the PVD film coating technology and has the advantages of simple preparation technology, economic raw materials, no pollution, nontoxic tail gas generated by reaction and the like, and the coating has high transmissivity to visible light with waveband from 600 to 800 nm, high hardness, strong scratch resistance and stable physical and chemical properties.

Description

technical field [0001] The invention relates to the field of film coating, in particular to a preparation method of a DLC coating with high visible light transmittance. Background technique [0002] Currently commonly used PVD coating technology is mainly divided into three categories, vacuum evaporation coating, vacuum sputtering coating and vacuum ion beam coating. Among them, the vacuum sputtering coating is to bombard the solid surface with high-energy particles, so that the particles on the solid surface can gain energy and escape from the surface, and deposit on the substrate. Vacuum ion beam coating means that in a vacuum environment (the degree of vacuum is 1*10-1Pa-5*10-1Pa), the introduced gas is ionized under the combined action of the electromagnetic field of the ion beam. The ionized ions are accelerated by the electric field between the ion beam and the substrate, and are bombarded or deposited on the substrate in the form of high-energy particles. The introd...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/46C23C14/06
Inventor 乐务时钱涛
Owner STARARC COATING TECH SUZHOU
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