Preparation method of Mo-Nb alloy board for sputtering target material
A molybdenum-niobium alloy and sputtering target technology is applied in sputtering coating, metal material coating process, ion implantation coating and other directions to achieve high yield, high relative density and good uniformity.
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Embodiment 1
[0023] Step 1. Place niobium powder with a mass purity of not less than 99.9% and molybdenum powder with a mass purity of not less than 99.97% with a Fischer average particle size of 3 μm in a mixer at a mass ratio of 1:9, at a speed of 40 rpm Down mixing 4h, obtain compound;
[0024] Step 2, carry out vibratory compaction to the compound described in step 1, obtain the molybdenum-niobium alloy powder compact that relative density is 75%; The vibration frequency in the described vibratory compaction process is 2000Hz, and the compacting force is 30MPa, and the holding time is 30s;
[0025] Step 3. Put the molybdenum-niobium alloy powder compact described in step 2 into a vacuum sintering furnace for sintering. The heating rate during the sintering process is 6°C / min. After the temperature in the furnace rises to 1900°C, keep it warm for 6 hours to obtain molybdenum Niobium alloy slabs;
[0026] Step 4: Mechanically cutting the molybdenum-niobium alloy slab described in step ...
Embodiment 2
[0029] Step 1, place niobium powder with a mass purity of not less than 99.9% and molybdenum powder with a mass purity of not less than 99.97% with a Fischer average particle size of 5.5 μm in a mixer at a mass ratio of 1:9, and place them in a mixer at a speed of 50 rpm Mixed for 3h under the conditions to obtain the mixture;
[0030] Step 2, carry out vibratory pressing to the mixture described in step 1, obtain relative density and be the molybdenum-niobium alloy powder compact of 78%; The vibration frequency in the described vibratory pressing process is 4000Hz, and the pressing force is 20MPa, and the holding time is 45s;
[0031] Step 3. Put the molybdenum-niobium alloy powder compact described in step 2 into a vacuum sintering furnace for sintering. The heating rate during the sintering process is 8°C / min. After the temperature in the furnace rises to 2000°C, keep it warm for 10 hours to obtain molybdenum Niobium alloy slabs;
[0032] Step 4: Mechanically cutting the ...
Embodiment 3
[0035] Step 1. Place niobium powder with a mass purity of not less than 99.9% and molybdenum powder with a mass purity of not less than 99.97% with a Fischer average particle size of 8 μm in a mixer at a mass ratio of 1:9, at a speed of 60 rpm Down mixing 2h, obtain compound;
[0036] Step 2, carry out vibratory pressing to the mixture described in step 1, obtain relative density and be the molybdenum-niobium alloy powder compact of 80%; The vibration frequency in the described vibratory pressing process is 6000Hz, and the pressing force is 10MPa, and the holding time is 60s;
[0037] Step 3. Place the molybdenum-niobium alloy powder compact described in step 2 into a vacuum sintering furnace for sintering. The heating rate during the sintering process is 10°C / min. After the temperature in the furnace rises to 2100°C, keep it warm for 8 hours to obtain molybdenum-niobium alloy alloy slab;
[0038] Step 4: Mechanically cutting the molybdenum-niobium alloy slab described in st...
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Abstract
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