Magnetic field for plating on inner wall of long pipe and field-enhanced arc ion plating device

An arc ion and coating device technology, which is applied in the field of material surface modification to achieve the effects of easy focusing and restraint, improved coating uniformity, and improved uniformity and deposition quality

Active Publication Date: 2012-02-08
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The object of the present invention is to provide a magnetic field and electric field enhanced arc ion coating device for coating the inner wall of a long tube, so as to solve the problems of arc ion coating on the inner wall of a long tube, etc.

Method used

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  • Magnetic field for plating on inner wall of long pipe and field-enhanced arc ion plating device
  • Magnetic field for plating on inner wall of long pipe and field-enhanced arc ion plating device
  • Magnetic field for plating on inner wall of long pipe and field-enhanced arc ion plating device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] After cleaning and drying the Φ60×100mm low-alloy steel mold with Φ30×70mm blind holes, fix it on the workpiece table of the arc ion plating device. Such as figure 1 As shown, the arc ion plating device mainly includes: vacuum chamber 1, workpiece magnetic field coil supporting cylinder I2, workpiece magnetic field coil 3, workpiece auxiliary electrode 6, plasma beam I7, plasma focusing magnetic field coil supporting cylinder I8, plasma Focusing magnetic field coil I9, cathode target I10, cathode target power supply 11, pulse bias power supply 12, workpiece table 13, etc., the specific structure is as follows:

[0047] The workpiece 4, the workpiece magnetic field coil supporting cylinder I2, the workpiece magnetic field coil 3, the workpiece auxiliary electrode 6 and the workpiece table 13 are arranged in the vacuum chamber 1, the workpiece magnetic field coil 3 is arranged outside the workpiece magnetic field coil supporting cylinder I2, and the workpiece magnetic fie...

Embodiment 2

[0053] Clean and dry a Φ50×80mm stainless steel tube with a Φ25×60mm blind hole, and fix it on the workpiece table of the arc ion plating device. Such as figure 2 shown, with figure 1 The difference is that the magnetic field of the workpiece magnetic field coil 3 in this embodiment adopts a gradient magnetic field, and the gradient magnetic field means that the magnetic field generating device placed outside the tubular workpiece in the vacuum chamber is three electromagnetic coils, and parameters such as the wire diameter and winding density of the electromagnetic coil Similarly, the magnetic induction of these electromagnetic coils is realized by adjusting the current of the electromagnetic coils respectively, and the magnetic induction decreases gradually along the direction of the plasma beam, thereby forming a gradient magnetic field. The gradient magnetic field is relative to the uniform magnetic field, and its characteristic is that the magnetic induction intensity g...

Embodiment 3

[0057] Clean and dry the Φ50×200mm stainless steel part with a Φ30×140mm through hole, and fix it on the workpiece table of the arc ion plating device. Such as image 3 As shown, the arc ion plating device mainly includes: vacuum chamber 1, workpiece magnetic field coil supporting cylinder I2, workpiece magnetic field coil 3, workpiece auxiliary electrode 6, plasma focusing magnetic field coil supporting cylinder I8, plasma focusing magnetic field coil I9, cathode Target I10, cathode target power supply 11, pulse bias power supply 12, workpiece table 13, cathode target II14, plasma focusing magnetic field coil II15, plasma focusing magnetic field coil support cylinder II16, etc. The specific structure is as follows:

[0058] The workpiece 4, the workpiece magnetic field coil supporting cylinder I2, the workpiece magnetic field coil 3, the workpiece auxiliary electrode 6 and the workpiece table 13 are arranged in the vacuum chamber 1, the workpiece magnetic field coil 3 is arra...

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Abstract

The invention, belonging to the field of surface modification on materials, relates to a magnetic field for plating on inner wall of long pipe and a field-enhanced arc ion plating device, characterized in that: the magnetic field is used to restrain and control the plasma beam motion trail in the arc ion plating process, two sets of magnetic field generators are arranged in an arc ion plating deposition device, one set is arranged on the plasma transmission channel outside a vacuum chamber for using the magnetic field to focus the plasma beam and restrain the diameter of cross section and transmission efficiency when transmitting the plasma beam, and the other set is arranged on the outside of a tubular workpiece in the vacuum chamber for guiding the plasma beam to diffuse along with the central axial direction of the tubular workpiece; field enhancement is used in arc ion plating for using the magnetic field to realize accelerated directional flow of plasma, a pulsed electric field is arranged in the workpiece; the magnetic field and electric field are used to restrain and control the plasma beam, so as to realize the coating deposition of the plasma on the inner wall of the tube. The invention is suitable for depositing coatings on the inner wall of tubular workpiece which is used as the service surface.

Description

Technical field: [0001] The invention belongs to the field of material surface modification, and relates to an arc ion coating device for magnetic field and electric field enhancement used for coating the inner wall of a long tube. Background technique: [0002] In industrial applications, the inner surface of a large number of metal workpieces needs to be modified, especially for pipe fittings, such as oil pump barrels on oil fields, oil pipelines, chemical pipelines, automobile cylinder liners, and military fields, especially on naval ships. For naval gun barrels, torpedo tubes, and other tubular parts whose inner walls need to be strengthened in harsh environments, ordinary treatment methods cannot meet the surface strengthening requirements. These workpieces often fail early due to inner wall wear, corrosion, and oxidation. Therefore, the development of surface modification technologies and processes with anti-wear, anti-corrosion, and anti-oxidation is an urgent problem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32
Inventor 赵彦辉肖金泉杜昊华伟刚于宝海宫骏孙超
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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