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Preparation method of copper-phosphorus alloy anode

A technology of alloy anodes and ingots, applied in the direction of electrodes, etc., can solve the problems of grain orientation, grain size that cannot meet the requirements of electroplating, and the metal film of integrated circuits is not uniform enough, so as to avoid cracks or other defects and improve the structure And mechanical properties, the effect of uniformity improvement

Active Publication Date: 2014-10-22
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology

[0005] However, the method for refining grains of copper-phosphorus alloy anodes is not yet mature, so the grain orientation and grain size of copper-phosphorus alloy anodes in the prior art cannot meet the requirements of electroplating, making the metal thin film of integrated circuits insufficient. uniform

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  • Preparation method of copper-phosphorus alloy anode
  • Preparation method of copper-phosphorus alloy anode

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Embodiment Construction

[0038] The present invention mainly uses the method of combining plastic deformation with a specific deformation rate and heat treatment at a specific temperature for multiple times, and strictly controls the deformation rate of plastic deformation, the temperature and time of heat treatment to realize the production of grain orientation and grain size that meet the requirements of electroplating. Grain-sized copper-phosphorus alloy anodes.

[0039] The inventor's dedicated research and repeated practice improvements have obtained the optimal method for making copper-phosphorus alloy anodes, the process flow of which is as follows figure 1 As shown, it mainly includes the following steps:

[0040] Step S11, performing the first heat treatment on the ingot, and then forging, performing the first heat treatment and the forging in sequence, a total of three times;

[0041] Step S12, performing a first cooling treatment on the ingot after the first heat treatment and forging;

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Abstract

A method for preparing an anode made of a copper-phosphorus alloy comprises the following steps in sequence: conducting first heat treatment on an ingot and forging in sequence for three times; conducting second heat treatment on the ingot after the last time of forging; conducting cold rolling on the ingot to form a blank; conducting third heat treatment on the blank; and machining the blank after the third heat treatment, so as to form the anode made of the copper-phosphorus alloy. According to the method, the combination of repeated plastic deformation with a specific deformation rate and annealing treatment under specific temperature is mainly adopted, and the deformation rate of the plastic deformation, the temperature during the annealing treatment, and the time of the annealing treatment are controlled strictly, so that the anode meeting the requirements on internal grain size and grain orientation for electroplating can be produced.

Description

technical field [0001] The invention relates to the field of electroplating, in particular to a method for preparing a copper-phosphorus alloy anode in an electroplating anode for semiconductors. Background technique [0002] Electroplating is the process of plating a thin layer of other metals or alloys on some metal surfaces using the principle of electrolysis. It uses the principle of electrolysis to attach a layer of metal film to the surface of metal or other material parts, so as to prevent corrosion, improve wear resistance, conductivity, reflectivity and enhance the appearance. [0003] In the plating tank filled with electroplating solution, the cleaned and specially pretreated parts to be plated are used as the cathode, and the plated metal is used as the anode, and the two poles are respectively connected to the negative and positive poles of the DC power supply. The electroplating solution is composed of an aqueous solution containing metal plating compounds, co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D17/10C25D3/58C22F1/08
Inventor 姚力军相原俊夫大岩一彦潘杰王学泽陈勇军
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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