X-ray camera and manufacturing method thereof

Abstract

The invention discloses an X-ray camera and a manufacturing method thereof. The X-ray camera is manufactured by coupling a fiber optic taper with a CCD (Charge Coupled Device) or CMOS (Complementary Metal-Oxide-Semiconductor) camera, wherein a needle-like CsI (Cesium Iodide) crystal, a moisture sealer and an aluminium coating or a silicon nitride film are arranged on a big end of the fiber optic taper in order; the fiber optic taper is manufactured by the steps of: sleeving a low-refractive-index cladding on a high-refractive-index core material of an ordinary fiber optic taper, on the basis, sleeving a black glass or lead silicate glass sleeve matching with the fiber optic taper in thermophysical properties, manufacturing a fiber array cylinder according to a front-end process of manufacturing a fiber optic panel, and then drawing the cylinder according to the proportion between the big end and a small end of the fiber optic taper, wherein the fiber optic taper made of the lead silicate glass sleeve requires hydrogen reduction treatment; and after the needle-like CsI crystal, the moisture sealer and the aluminium coating or silicon nitride film are manufactured in order on the big end of the fiber optic taper, the small end of the fiber optic taper is coupled with a light-sensitive surface of the camera by using optical cement. The X-ray camera manufactured in such a way has the minimum pixel reaching 5 micrometers and the resolution ratio being above 301p/mm with good MTF (Modulation Transfer Function).

Description

technical field [0001] The invention belongs to the technical field of X-ray imaging, and mainly relates to a high-resolution X-ray camera and a manufacturing method thereof, in particular to a light cone coupling CCD or CMOS camera and a manufacturing method thereof. Background technique [0002] Since the discovery of X-rays by German physicist Roentgen in 1895, X-ray photography and dynamic imaging have been widely used in the fields of medical and industrial imaging. With the continuous improvement of the quality of CCD and CMOS devices and their wide application in the industrial field, high-resolution, digital and remote diagnostic X-ray CCD or CMOS cameras provide a strong technical support for medical imaging and industrial non-destructive detection. And it is possible to replace traditional X-ray imaging equipment. In the field of medical imaging, the equipment that converts X-rays into digital images is called DR (Digital Radiography), which is a general term for ...

AI Technical Summary

Problems solved by technology

[0009] The technical problem to be solved by the present invention is: aiming at the actual situation that the above-mentioned X-ray camera cannot obtain high resolution and high conversion efficiency at the same time, the present invention provides an improved light cone and its manufacturing method, and vapor-deposits a thick needle-shaped Structured CsI(Tl) scintillation crystals that resolve crosstalk between fiber monofilaments

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