Miniature spectrograph with diffraction hole array structure and high resolution spectrum reconstruction method thereof
A technology of high-resolution spectroscopy and micro-spectrometer, which is applied in the field of micro-spectroscopy measurement devices, can solve the problems of narrow wavelength measurement range, large size of the spectrometer and low resolution, and achieves a wide spectrum measurement range, high resolution and easy portability. Effect
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[0027] figure 1It is a diffraction hole array structure adopted in the present invention. The diffraction hole array miniature spectrometer includes a two-dimensional array of diffraction holes 1 built in the light-blocking layer 2 on the surface of the substrate 3, and the diffraction holes 1 in each diffraction structure unit have different apertures in the light-blocking layer 2, and the aperture size is the same as the wavelength of the incident light. Close, the depth of each diffraction hole 1 is the same and is equal to the thickness of the light blocking layer 2; the interval between each diffraction hole 1 in the two-dimensional array of diffraction holes is about 10 μm or more; the detection array chip 4 is arranged under the substrate 3, and each A pixel element in the detection array chip 4 is correspondingly set directly below the diffraction hole 1; if each pixel element has a large area, in order to improve the sensitivity of the device, a shading plate 5 is pr...
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