Micro spectrometer

Abstract

The utility model discloses a micro spectrometer, and belongs to the technical field of optical measurement. The micro spectrometer comprises an optical collimation device, a light split device, an array type detection chip and a data collection and analysis system, wherein the optical collimation device, the light split device and array type detection chip are successively arranged along the incidence direction of an optical path, and the data collection and analysis system is connected with the array type detection chip. The light split device comprises a transparent base, a nanometer particle layer fixed on at least one surface of the transparent base is composed of a group of transparent particles, the dimensions of the transparent particles are defined from nanometer to micrometer, and the sizes and the shapes of the transparent particles are distributed unevenly. According to the micro spectrometer, the light split device of the nanometer coating structure is utilized, and the micro spectrometer has the advantages being high in measuring height, large in measuring range, not sensitive in vibration and the like. Meanwhile, the manufacturing processes are simple, and achieving cost is low.

Description

technical field [0001] The invention relates to a spectrum measurement device, in particular to a portable, real-time detectable miniature spectrometer, which belongs to the technical field of optical measurement. Background technique [0002] The spectrometer is an important optical instrument, which is widely used in various fields of science and technology today. The spectrometer can obtain the spectral signal of the substance and analyze its composition and content, such as the detection and analysis of harmful substances and vitamins in the food industry, the detection of specific elements in chemical and biological analysis, and the analysis of the fine structure of molecules and atoms. In the geological exploration and metallurgical industry, the composition of ore and the content of various substances are inspected. In short, the spectrometer has become an irreplaceable part of modern scientific equipment. [0003] The development of electronic technology and compu...

AI Technical Summary

Problems solved by technology

The spectroscopic devices in the two technical solutions respectively adopt the step array structure and the diffraction hole array structure, but whether it is a spectrometer with a step structure or a diffraction hole structure, its production cost is high, the production process is complicated, and expensive equipment is required. For example, ion etching system or lithography equipment, etc., so it is necessary to further seek array structure micro-spectrometers with lower cost and simpler manufacturing process

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