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Wavelength scanning interferometer and method for aspheric measurement

A technology of wavelength scanning and aspheric surface, which is applied in the direction of measuring device, measuring optics, reflective surface testing, etc.

Active Publication Date: 2012-07-18
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of additional length interferometers also increases the complexity and cost of the system, which reduces the reliability of the measurement to a certain extent

Method used

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  • Wavelength scanning interferometer and method for aspheric measurement
  • Wavelength scanning interferometer and method for aspheric measurement
  • Wavelength scanning interferometer and method for aspheric measurement

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Embodiment 1

[0026] figure 1 It is the system schematic diagram of the wavelength scanning interferometer used for aspheric surface measurement of the present invention. Such as figure 1 As shown, the wavelength scanning interferometer and method for measuring aspheric surfaces of the present invention include a translation stage 1, a measured aspheric surface 2, a first mirror group 3, a beam splitter 4, a plane mirror 5, a beam expander mirror 6, and a tunable laser 7 , imaging lens 8, CCD camera 9, reference plane mirror 10, image card 11, computer 12 and data card 13. Among them, the measured aspheric surface 2 is fixed on the translation stage 1, the measured aspheric surface 2, the first mirror group 3, the beam splitter 4, the imaging lens 8 and the CCD camera 9 are placed coaxially in sequence, and the plane mirror 5 and the reference plane mirror 10 are respectively placed on the The bottom and top of the beam splitter 4, the CCD camera 9, the image card 11, the computer 12 an...

Embodiment 2

[0030] figure 2 It is another system schematic diagram of the wavelength-scanning interferometer used for aspheric surface measurement of the present invention. It takes the form of a Fizeau interferometer. and figure 1The difference is that the reference beam is formed by Fresnel reflection of the last surface of the second mirror group 14 (the leftmost surface of the second mirror group in the figure). The light beam emitted from the tunable laser 7 becomes a parallel beam after being expanded by the beam expander 6, and a part thereof is reflected by the beam splitter 4 to the second mirror group 14, and the last surface of the second mirror group 14 is not coated with an anti-reflection coating, so Part of the incident light will be reflected back to the beam splitter 4, and the other part will be focused by the second lens group 14 and then incident on the measured aspheric surface 2 and be reflected back. The two parts of light are superimposed on the beam splitter ...

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Abstract

The invention discloses a wavelength scanning interferometer and a method for aspheric measurement. The wavelength scanning interferometer comprises a set of tunable laser, a Twyman-Green interferometer, a translation platform, an image card and a data card, wherein the set of tunable laser serves as a light source; the Twyman-Green interferometer is used for generating interferometric fringes; the translation platform is used for scanning optical path difference along an optical axis; the image card is used for converting interference data into a digital signal and transmitting the digital signal into a computer; and the data card is used for synchronizing action of a charge coupled device (CCD) cameral and the translation platform. Different from the traditional aspheric measurement method, the interferometer has wide application range, can measure surface with large non-spherical degree or wavefront, and does not need to compensate a zero position mirror. In addition, the method does not require a multi-dimensional moving platform which is complex and expensive generally.

Description

technical field [0001] The invention relates to a high-precision interferometric measurement technology of an aspheric surface, in particular to a wavelength-scanning interferometer and a method for measuring an aspheric surface. Background technique [0002] Compared with traditional optical systems using multiple spherical elements, aspheric surfaces are widely used because they can effectively simplify the system structure while maintaining corresponding performance. Using an aspheric surface often results in an optical system with fewer components and lighter weight. Because of this, aspheric surfaces are widely used in fields such as deep ultraviolet lithography, high-quality imaging systems, astronomical telescopes, and high-density optical storage. [0003] At present, there are many methods and corresponding ones in the field of aspheric surface measurement, such as profilometers and coordinate measuring machines based on the stylus method, interferometers based on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01J9/02G01B11/24
CPCG01B11/2441G01M11/005G01B9/02039G01B9/02041
Inventor 汪凯巍白剑沈亦兵杨甬英
Owner ZHEJIANG UNIV
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