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Preparation method of biplanar super-resolution imaging lens

A super-resolution imaging, biplane technology, applied in the direction of lens, optics, instrument, etc., can solve the problem that it is difficult for the adjacent silver film and dielectric layer to meet the matching conditions, and achieve the effect of efficient processing method.

Inactive Publication Date: 2012-08-01
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it is difficult to make the thicknesses of adjacent silver films and dielectric layers meet the matching conditions at each position in the groove.

Method used

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  • Preparation method of biplanar super-resolution imaging lens
  • Preparation method of biplanar super-resolution imaging lens
  • Preparation method of biplanar super-resolution imaging lens

Examples

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Embodiment 1

[0026] Embodiment 1, making a super-resolution imaging lens with double-plane zooming magnification, its specific manufacturing process is as follows:

[0027] (1) in such as figure 1 Prepare a circular groove on the flat and clean quartz substrate as shown: figure 2 As shown, the bottom surface of the circular groove is parallel to the substrate surface, the diameter of the upper bottom of the circular groove is 800nm, the diameter of the lower bottom is 600nm, and the depth is 200nm.

[0028] (2) if image 3 As shown, a layer of ethanol dispersion of silver nanoparticles with a silver concentration of 0.3g / ml is spin-coated on the substrate, and after drying at 160°C to remove the ethanol, the silver nanoparticles combine to form a silver film layer, in which the silver nanoparticles in the circular groove The thickness of the inner silver film layer is 15-30 nm. The thickness distribution law of the first silver film layer in the groove is: the central area of ​​the gr...

Embodiment 2

[0031] Embodiment 2, making a super-resolution imaging lens with biplane zooming magnification, its specific manufacturing process is as follows:

[0032] (1) in such as figure 1 Prepare a square groove on the flat and clean quartz substrate as shown, the bottom surface of the groove is parallel to the substrate surface, the side length of the upper bottom of the groove is 1500nm, the diameter of the lower bottom is 1000nm, and the depth is 400nm.

[0033] (2) Spin-coat a layer of AgNO with a concentration of 2g / ml on the substrate 3 aqueous solution, and then post-bake at 80°C to evaporate the AgNO 3 Moisture in the aqueous solution, the substrate is subjected to ultraviolet light to make AgNO 3 Decompose into silver film layer, wherein the thickness of the silver film layer in the square groove is 10-20 nanometer. The thickness distribution law of the first silver film layer in the groove is: the central area of ​​the groove is thin, and the edge area of ​​the groove is ...

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Abstract

The invention provides a preparation method of a biplanar super-resolution imaging lens. The method comprises the steps that a flat bottom of a submicron depth is prepared on an ultraviolet transparent substrate, wherein the cross section of the groove, which is parallel to the surface of the substrate, is in the shape of a circle, a square, a regular octagon or a rectangle; a layer of silver precursor solution is coated on the substrate, and the silver precursor solution can form an arc-surfaced film layer in the groove under the action of surface tension and is solidified into a silver film after being heated or irradiated by ultraviolet light; then a layer of sol-shaped media is coated on the silver film layer, and the sol-shaped media can form another arc-surfaced film layer in the groove under the action of surface tension and is solidified into a medium film after being heated; and the rest steps can be done in the same manner until the groove is filled up, and then the zoom-ratio super-resolution imaging lens of which the object surface and the image surface are both planes is obtained. The biplanar zoom-ratio super-resolution imaging lens prepared by adopting the preparation method has the advantages that the lithography can be reduced or images can be amplified two-dimensionally or one-dimensionally.

Description

technical field [0001] The present invention relates to the technical field of lens preparation, and in particular to a preparation method of a double-plane super-resolution imaging lens, which is a preparation method of a zoom super-resolution imaging lens, which alternately coats and solidifies silver films in flat-bottomed grooves A method for preparing a double-plane zoom super-resolution imaging lens with layers and dielectric layers. Background technique [0002] The zoom super-resolution imaging lens utilizes the property that the evanescent wave of the surface plasma beam propagates in the metal / dielectric multilayer film perpendicular to the direction of the metal / dielectric film interface, and prepares the metal / dielectric film layer into a curved surface structure, so that the evanescent wave of the surface plasmon beam Bending and propagating according to the predetermined route to realize the enlargement or reduction of the image. The zoom super-resolution imag...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G02B1/10
Inventor 罗先刚赵泽宇王长涛刘凯鹏冯沁胡承刚黄成杨磊磊陶兴张鸶懿
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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