Pixel array substrate
A pixel array substrate, substrate technology, applied in the direction of optics, instruments, electrical components, etc., can solve the problems of inability to reduce the display pixel area, increase the capacitance plane area, and improve the screen resolution, etc., to achieve the reduction of backlight brightness and pixel size The effect of miniaturization and area reduction
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[0063] Figure 2A to Figure 2G It is a schematic cross-sectional view of the manufacturing process of the pixel array substrate according to an embodiment of the present invention.
[0064] Please refer to Figure 2A A first sub-insulation layer 212 and a second sub-insulation layer 214 are sequentially formed on a surface S of a substrate 210 . In this embodiment, the substrate 210 is, for example, a glass substrate, and the material of the first sub-insulation layer 212 is, for example, silicon nitride (SiN x ), and the material of the second sub-insulation layer 214 is, for example, silicon oxide (SiO x ), but the present invention is not limited thereto.
[0065] Please refer to Figure 2B , forming a channel material layer (not shown) on the second sub-insulation layer 214 . The material of the channel material layer can be low temperature polysilicon or amorphous silicon. In this embodiment, the material of the channel layer is low-temperature polysilicon, wherein th...
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