The invention relates to a controlled
silicon chip structure of a mesa technology. The structure comprises an N+ type
cathode region, a front surface P-type short base region, a glass
passivation film, front surface grooves, a SiO2 protective film, a
silicon single crystal chip, a gate pole
aluminum electrode and a
cathode aluminum electrode, wherein the front side of the
silicon single crystal chip is provided with the front P-type short base region; the back side of the silicon
single crystal chip is provided with a P-type region; the surface of the front surface P-type short base region isprovided with the SiO2 protective film, the gate pole
aluminum electrode and the
cathode aluminum
electrode; the front grooves are arranged on the front surface P-type short base region and the silicon single
crystal chip, and are positioned at two sides of the gate pole aluminum
electrode and the cathode aluminum
electrode; and the N+ type cathode region is arranged between the cathode aluminum electrode and the front P-type short base region. The structure is characterized in that the bottom part of a dual-pass insulation
diffusion region is provided with a back side stress balance groove. The structure provided by the invention has the advantages of mature structure and technology, simple manufacturing process, good
breakdown voltage property of the manufactured chip, high percent of pass, and high reliability of products.