System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference

Abstract

The invention discloses a system for measuring the nanometer micrometric displacement based on full-fiber frequency domain interference. A broadband light source of the system is connected with a port I of an optical fiber circulator through an optical fiber, a port II of the optical fiber circulator is connected with one end of a silica optical fiber probe through the optical fiber, a port III of the optical fiber circulator is connected with an optical spectrometer through the optical fiber, and tail fibers of components are connected through a flange plate or in a welding method. The system disclosed by the invention has the ability of measuring the nanometer micrometric displacement, is a non-contact type measuring device, can be used for statically and dynamically measuring the distance from the surface of an objected to be tested to the surface of the probe, and can be used for measuring metal or nonmetal. According to the system disclosed by the invention, by adopting a full-fiber-structured device, the operation difficulty is greatly reduced, the promotion and the use of the device are facilitated, and the anti-interference ability is strong.

Description

technical field [0001] The invention relates to a displacement sensor, in particular to a sensing device with nanoscale displacement resolution capability. Background technique [0002] Displacement is the amount of movement of the object's position during motion. The measurement of displacement involves a wide range. Among them, the measurement of micro-displacement involves precision measurement and micro-electromechanical systems. Many physical quantities can be indirectly detected by measuring displacement, such as acceleration. , pressure and stress etc. At present, micro-displacement is usually detected by sensors such as inductance, grating and eddy current. Inductive displacement sensor has non-sliding contacts. Although it is not affected by non-metallic factors such as dust, it has low power consumption and long life, but the measurement object must be a metal conductor. In addition, because it is a contact measurement, it may affect the The measured object has a...

AI Technical Summary

Problems solved by technology

The eddy current sensor uses the eddy current effect to measure the distance between the measured metal conductor and the probe surface statically and dynamically, with high linearity and high resolution, but the measured object must be a metal conductor, which limits its wide application.

To sum up, the current displacement sensing technology has shortcomings in measuring nanoscale micro-displacement, and it is difficult to meet the growing requirements of precision measurement and micro-electromechanical systems.

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