Preparation method of solid state chemistry micro-propeller

Abstract

The invention relates to a manufacturing method of a micro-propeller, which belongs to the field of manufacturing of micro electro mechanical systems. The method comprehensively utilizes a metal aluminium film process and a metal stripping process and comprises the following steps of: sputtering metal aluminium on the surface of a silicon wafer; performing photoetching on the silicon wafer to prepare a combustion chamber and a nozzle by using aluminium as a mask and by virtual of deep reactive ion etching (DRIE); performing the stripping process on the surface of a glass sheet to obtain an igniter; and performing the stripping process on the glass sheet to obtain a copper wire and a copper bonding pad. The manufacturing method has the beneficial effects that by virtue of common photoresist and the metal aluminium film, a structure with the deeper combustion chamber and the nozzle is prepared on the surface of the silicon wafer, so that thicker rubber is avoided; as an ignition circuit is prepared by the metal stripping process, the problems of security of etching agents and uncontrollability of corrosion velocity of the agents in a metal wet etching process are solved; and therefore, the process difficulty is reduced, and the manufacturing process is ensured to be successful.

Description

technical field [0001] The invention relates to a manufacturing method of a micro-propeller, which belongs to the field of micro-electro-mechanical system manufacturing. Background technique [0002] MEMS thrusters are a new direction for the development of micro-propulsion systems, creating a new way for the research of micro-satellites, especially nano / pico-satellite propulsion systems, and solid chemical micro-thrusters based on MEMS technology have simple structure, low power consumption, With a series of advantages such as no moving parts, high integration, and good reliability, it has become a new research hotspot at home and abroad. [0003] refer to Figure 4 , the miniature solid-state chemical thruster includes a bonded silicon chip 1 and a glass chip 7; the surface 14 of the silicon chip 1 is concave to form a combustion chamber 5 and a nozzle 15; there are linear lower wire grooves 16 and upper wires on both sides of the combustion chamber 5 Groove 3; glass shee...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the disadvantages that ordinary photoresists cannot obtain deeper combustion chambers, nozzle structures and wet etching metal processes in the prio

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