Machining process for batched machining in multi-surface polishing of sapphire single-crystal cuboid window

A processing technology, batch processing technology, applied in metal processing equipment, grinding/polishing equipment, machine tools suitable for grinding workpiece edges, etc., can solve the problems of high cost, slow speed, and difficult processing, and achieve production efficiency High, good quality, good product consistency

Active Publication Date: 2012-10-17
大连淡宁实业发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to use double-sided grinding and polishing equipment to solve the problems of multi-faceted processing of cuboid window materials such as difficulty, high cost, and slow speed through the cooperation of fixtures and

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Embodiment one: Batch processing technology for multi-faceted polishing of sapphire single crystal cuboid window with specifications of 50mm×39mm×10mm

[0046] Replace the six sides of the sapphire single crystal cuboid window with a size of 50 mm×39mm×10mm with the following names:

[0047] 50mm×39mm large surface with symbol S 1 Instead, the end face of 50mm×10mm uses the symbol S 2 Instead, the end face of 39mm×10mm is marked with symbol S 3 replace.

[0048] first step: For workpiece S 1 rough grinding

[0049] Protective chamfering is performed on each edge of the sapphire single crystal cuboid window using a diamond grinding wheel. Before processing, use the correction wheel to correct the surface shape of the grinding disc of the double-sided grinding and polishing equipment. Then place the workpiece in the planetary fixture, and spread the abrasive evenly on the S 1 on the surface of the face. During the coarse grinding process, use W40 boron carb...

Embodiment 2

[0068] Embodiment two: Batch processing technology for multi-faceted polishing of sapphire single crystal cuboid window with size 46mm×39mm×8mm

[0069] Replace the six sides of the sapphire single crystal cuboid window with a size of 46 mm×39mm×8mm with the following names:

[0070] 46mm×39mm large surface with symbol S 1 Instead, the end face of 46mm×8mm uses the symbol S 2 Instead, the end face of 39mm×8mm is marked with S 3 replace.

[0071] first step: For workpiece S 1 rough grinding

[0072] Protective chamfering is performed on each edge of the sapphire single crystal cuboid window using a diamond grinding wheel. Before processing, use the correction wheel to correct the surface shape of the grinding disc of the double-sided grinding and polishing equipment. Then place the workpiece in the planetary fixture, and spread the abrasive evenly on the S 1 on the surface of the face. During the rough grinding process, use W40 boron carbide abrasive, (concentrat...

Embodiment 3

[0091] Embodiment three: Batch processing technology for multi-faceted polishing of sapphire single crystal cuboid window with specifications of 60mm×59mm×12mm

[0092] Replace the six sides of the sapphire single crystal cuboid window with a size of 60 mm×59mm×12mm with the following names:

[0093] 60mm×59mm large surface with symbol S 1 Instead, the end face of 60mm×12mm uses the symbol S 2 Instead, the end face of 59mm×12mm is marked with S 3 replace.

[0094] first step: For workpiece S 1 rough grinding

[0095] Protective chamfering is performed on each edge of the sapphire single crystal cuboid window using a diamond grinding wheel. Before processing, use the correction wheel to correct the surface shape of the grinding disc of the double-sided grinding and polishing equipment. Then place the workpiece in the planetary fixture, and spread the abrasive evenly on the S 1on the surface of the face. During the coarse grinding process, use W40 boron carbide ab...

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PUM

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Abstract

The invention discloses a machining process for batched machining in multi-surface polishing of a sapphire single-crystal cuboid window, which adopts double-surface grinding and polishing equipment for grinding and polishing on window workpieces. The machining process comprises the following steps of: putting a sapphire hexahedral window in a wandering-star wheel clamp by using the workpieces, firstly grinding big surfaces, using a clamp made of epoxy resin material , adopting W40 boron carbide for coarse grinding and adopting W7 boron carbide for fine grinding; then carrying out grouped bonding on workpieces according to the specifications, and carrying out coarse grounding and fine grinding on the four end surfaces of the bonded workpieces; after grinding, using silicon dioxide solution (the particle diameter is 80-100nm and the pH value is 10-11) to polish the bonded end surfaces; after polishing, carrying out splitting on the workpieces, protecting the four end surfaces of polished single workpiece by using transparent adhesive tapes, and then polishing the big surfaces of the window workpieces. The machining process disclosed by the invention has the advantages that batched machining is carried out on multi-surface polishing of the similar hexahedral window, the production efficiency is high, the consistency of products is good, the quality is excellent, and all process links and quality parameters can be controlled; and the roughness of the polished surfaces of the workpieces is less than 0.3nm, the degree of parallelism is less than 10 seconds and the optimal finish can reach 40-20.

Description

technical field [0001] The processing technology for batch processing of multi-faceted polishing of sapphire single crystal cuboid window is a process flow and processing method for batch processing of sapphire single crystal cuboid window workpieces. Background technique [0002] Sapphire single crystal materials are widely used in modern optical and semiconductor industries. It has many excellent characteristics, such as: high hardness, high melting point, good light transmission, excellent thermal conductivity and electrical insulation, stable chemical properties, etc. Among many windows, sapphire is more and more popular in material selection. However, due to the extremely high hardness of sapphire single crystal material itself (Mohs hardness 9), it is difficult to process, especially cuboid or heterogeneous window materials have always been a major problem in processing, and it is even more difficult to obtain excellent shape indicators and surface quality. . [0003...

Claims

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Application Information

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IPC IPC(8): B24B9/16B24B37/08
Inventor 郑琛王晨宇
Owner 大连淡宁实业发展有限公司
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