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Manufacture method for membrane resistance thermometer

A manufacturing method and technology of thin film resistors, applied in the application of thermometers, thermometers, thermometers with directly sensitive electrical/magnetic components, etc., can solve problems such as inconsistency, increased width, and thin film.

Active Publication Date: 2012-10-24
CHINA ACAD OF AEROSPACE AERODYNAMICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] For a glass substrate with a sharp front edge shape, if the film is coated along the axial direction at the sharp point of the front edge, directly using the above method will make the two sides of the 0.1mm wide gap on the mask upturned, causing the film to become void, the width increases, and the front and rear are inconsistent, showing olive shape
The width of the film obtained in this way will reach 0.5mm~1mm, which will cause the change of film resistance and the instability of the temperature coefficient of resistance of the sensor.
In addition, for the measurement of the heat flow at the stagnation point of the sharp leading edge, the increase in the width of the film makes the measured heat flow the average heat flow in the larger circumferential angle range of the leading edge, which has a large deviation from the true heat flow at the stagnation point

Method used

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  • Manufacture method for membrane resistance thermometer
  • Manufacture method for membrane resistance thermometer
  • Manufacture method for membrane resistance thermometer

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Embodiment Construction

[0032] (1) Use acetone to clean the borosilicate glass substrate with a sharp front edge shape, and clean the glass substrate again by ion bombardment in the coating machine, and the ion bombardment time is 20 minutes. The shape of the glass substrate is shown in Figure 1, including a pointed front edge 11; the radius of the pointed front edge ranges from 1 mm to 5 mm. The length direction of the leading edge is along the cylindrical axis of the tip of the leading edge, such as Figure 1a Arrow direction shown. The circumferential direction of the leading edge is along the circular arc direction of the cylinder, such as Figure 1b Arrow direction shown. The pointed front edge is used to simulate the stagnation point of the pointed front edge of the aircraft.

[0033] (2) Mount the glass substrate in the coating fixture. The structure of the coating fixture is shown in FIG. 2, including a base 21, a pressing plate 22, a bayonet 23, a side adjustable screw 24, and a bottom adjusta...

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Abstract

The invention discloses a manufacture method for a membrane resistance thermometer. The membrane resistance thermometer is used for measuring sharp leading-edge stagnation heat flux. The manufacture method for the membrane resistance thermometer comprises the following steps of: cleaning a glass substrate which comprises a sharp leading edge; (2) plating a platinum membrane on the sharp leading edge of the glass substrate along the length direction of the glass substrate; (3) carrying out thermal treatment to the platinum membrane to age the platinum membrane; (4) coating silver slurry on the glass substrate, and drying and sintering the sliver slurry; and (5) plating a Gamma alloy membrane on the sharp leading edge along the circumference of the sharp leading edge, then plating a silver membrane on the Gamma alloy membrane, and connecting two ends of the platinum membrane with the sliver slurry by the silver film. With the method disclosed by the invention, a purpose of plating the membrane on the sharp leading edge part can be realized, so that the film becomes firmer and more resistant to cleaning, and therefore the sharp leading-edge stagnation heat flux can be more accurately measured.

Description

Technical field [0001] The invention relates to a manufacturing method of a thin film resistance thermometer, which is suitable for measuring the stagnant heat flow of the tip edge. Background technique [0002] The sharp leading edge shape aircraft has a great advantage in aerodynamic performance, but it will bring about the problems of high heat flux density and difficulty in heat protection. In addition, in order to maintain the shape and high lift-to-drag ratio of the new hypersonic aircraft, it is necessary to adopt non-ablative thermal protection technology, which puts forward higher requirements on the accuracy of thermal environment prediction. [0003] In terms of wind tunnel experimental measurement, due to the large curvature of the tip front edge, the requirements for heat flow measurement sensors (such as thin-film resistance thermometers) are very strict, which can neither damage the front edge profile but also reflect the true heat flow load. In addition, the damage...

Claims

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Application Information

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IPC IPC(8): G01K7/16G01K13/00C23C14/04C23C14/34
Inventor 陈星宫建师军林键
Owner CHINA ACAD OF AEROSPACE AERODYNAMICS
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