Self-powered pressure sensor

A pressure sensor, self-powered technology, applied in the field of pressure sensors, can solve problems such as weak controllability, short service life, complex production process, etc., achieve good stability, long service life, and improve sensitivity

Active Publication Date: 2012-10-24
NAZHIYUAN TECH TANGSHAN LLC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This patent application discloses a high-sensitivity pressure sensor using the piezoelectric effect of zinc oxide nanowires, but the production of zinc oxide nanowire films has problems such as complex production process, weak controllability, and short service life.

Method used

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Experimental program
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Embodiment Construction

[0020] Below, the specific implementation manners of the present invention will be further described in conjunction with the accompanying drawings.

[0021] attached figure 1 Shown is a typical structure of a fully transparent self-powered pressure sensor based on polymers. The self-powered pressure sensor is like a sandwich consisting of two different polymer sheets stacked on top of each other with an intervening membrane3 in between. as attached figure 1 As shown, polyethylene terephthalate (PET) is used as the first polymer insulating layer 2, and one side of the surface is coated with an indium tin oxide (ITO) conductive film 1, and the insulating layer 2 and the conductive film 1 form the first sensing electrode. The other sensing electrode also uses polyethylene terephthalate (PET) as the second polymer insulating layer 4, and is coated with an indium tin oxide (ITO) conductive film 1 on one side of the surface; different An intermediate film 3 is pasted on the seco...

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Abstract

The invention provides a self-powered pressure sensor which comprises a first induction electrode, a second induction electrode and an intermediate film. The first induction electrode comprises a first macromolecular polymer insulating layer, wherein a conductive film is arranged on the surface of one side of the first macromolecular polymer insulating layer. The second induction electrode comprises a second macromolecular polymer insulating layer, wherein a conductive film is arranged on the surface of one side of the second macromolecular polymer insulating layer, and the intermediate film is fixed on the surface of the other side of the second macromolecular polymer insulating layer. The non-fixed surface of the intermediate film is provided with a micro/nano concave-convex structure. The surface of the micro/nano concave-convex structure of the intermediate film on the second induction electrode is just oppositely attached to and fixedly connected with the surface of the first induction electrode not provided with the conductive film, and the conductive film on the first induction electrode and the conductive film on the second induction electrode are both induction signal output poles. The self-powered pressure sensor is ingeniously made by utilizing a principle of electrification by friction and has the advantages of being high in sensitivity, easy to prepare, low in cost, good in stability in use and quick in response speed and the like.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a high-sensitivity self-powered pressure sensor. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools , pipeline and many other industries. [0003] There are many types of mechanical sensors, such as resistance strain gauge pressure sensors, semiconductor strain gauge pressure sensors, piezoresistive pressure sensors, inductive pressure sensors, capacitive pressure sensors, resonant pressure sensors and capacitive acceleration sensors. The pressure sensors we usually use are mainly manufactured using the piezoelectric effect, and such sensors are also called pi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/16
Inventor 王中林范凤茹
Owner NAZHIYUAN TECH TANGSHAN LLC
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