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Industrialized automatic control plasma source nitriding device and technology thereof

A technology of plasma source and nitriding, applied in metal material coating process, coating, solid-state diffusion coating, etc. sex issues

Inactive Publication Date: 2012-12-05
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, the industrialized plasma source nitriding device adopts the conventional manual operation method. Since the plasma source nitriding process is a multi-parameter control process, the process parameters, plasma state, and sputtering rate in the plasma source nitriding process Changes directly affect the nitriding amount and performance of the workpiece. Manual operation will inevitably cause large fluctuations and randomness in the plasma state, and it is difficult to ensure the repeatability of the plasma source nitriding process and the quality of the workpiece nitriding layer.

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  • Industrialized automatic control plasma source nitriding device and technology thereof
  • Industrialized automatic control plasma source nitriding device and technology thereof
  • Industrialized automatic control plasma source nitriding device and technology thereof

Examples

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Embodiment 1

[0065] A valve factory requires the manufacture of plasma source nitriding devices to perform plasma source nitriding treatment on the surface of austenitic stainless steel (Fe-Cr-Ni system) ball valves. The structure performance is stable, and the nitriding temperature fluctuates greatly with the conventional manual plasma source nitriding device, and CrN is easy to precipitate, which is difficult to meet its requirements. Now the industrialized automatic control plasma source nitriding technology proposed by the present invention is used to realize it , its specific parameters and steps are as follows:

[0066] The first step, workpiece preparation and furnace loading

[0067] Put the workpiece into the ultrasonic cleaning machine, add cleaning agent, turn on the ultrasonic wave, and clean it for 15 minutes. After taking it out, wipe it with anhydrous alcohol cotton and dry it; open the vacuum chamber, place the cleaned workpiece on the sample stage, Close the vacuum chambe...

Embodiment 2

[0077] An engine factory requires the manufacture of plasma source nitriding equipment to carry out plasma source nitriding treatment on piston rings of martensitic stainless steel (Cr13 series). Due to the requirements of surface wear resistance, low nitriding distortion, and stable performance of the nitriding layer, conventional The manually operated plasma source nitriding device is difficult to meet its requirements, and the industrialized automatic control plasma source nitriding technology proposed by the present invention is now used to realize it. The specific parameters and steps are as follows:

[0078] The first step, workpiece preparation and furnace loading

[0079] Put the piston ring into the ultrasonic cleaning machine, add cleaning agent, turn on the ultrasonic wave, and clean it for 15 minutes. After taking it out, wipe it with anhydrous alcohol cotton and dry it; open the vacuum chamber, and hoist the cleaned piston ring on the metal mesh cover Close the va...

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Abstract

The invention provides an industrialized automatic control plasma source nitriding device and a technology thereof, and belongs to the field of material surface engineering. The industrialized automatic control plasma source nitriding device adopts a computerized automatic monitoring nitriding system to be respectively connected with a thermocouple, a capacitive thin-film absolute pressure vacuum gage, a direct current pulse current and a gas mass flow controller, thereby recording and automatically controlling multiple parameters of the plasma source nitriding technology in real time. Full automation of a plasma source nitriding technological process and accurate control of unit surface area nitriding doses of work pieces are realized, the technological flow is simplified, the labor intensity is reduced, the production efficiency is improved, feedback response in a computerized control process is quick, the control precision is high, and the repeatability of the technology and the quality of nitrided layers of the work pieces are guaranteed.

Description

technical field [0001] The invention relates to an industrial automatic control plasma source nitriding device and a process thereof, belonging to the field of material surface engineering. Background technique [0002] Ion nitriding technology uses the principle of gas glow discharge to place the workpiece on the cathode, the furnace wall is the anode, and hundreds of volts of DC / DC pulse voltage is applied between the cathode and anode. The discharge in the vacuum chamber causes the ionization of low-pressure nitrogen-hydrogen gas, and the Under the action of the electric field, the charge energy bombards the surface of the workpiece, generating a large amount of heat to heat the workpiece to the nitriding temperature. At the same time, the active nitrogen generated by the discharge undergoes physical and chemical reactions such as adsorption, combination, and diffusion on the surface of the workpiece, and a certain depth of nitriding layer is obtained. Ion nitriding techn...

Claims

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Application Information

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IPC IPC(8): C23C8/36
Inventor 雷明凯李广宇朱小鹏李昱鹏袁力江
Owner DALIAN UNIV OF TECH