Write once read many (WORM) compact disc based on copper nitride film and manufacture method thereof
A technology of copper nitride and thin film, which is applied in the field of optical storage, can solve the problems of human body harming the environment, pollution, toxicity, etc., and achieves the effect of low price, low equipment requirements, and simple manufacturing process
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[0055] (1) A glass plate with a thickness of 1.2 mm was selected as the substrate, and a copper nitride film was prepared on the glass substrate by reactive DC magnetron sputtering. The sputtering target is a 99.999% high-purity copper target with a diameter of 50 mm and a thickness of 5 mm. The distance between the target and the substrate is 60 mm, and the working gas is 99.99% high-purity nitrogen and 99.99% high-purity argon, respectively controlled by mass flow meters.
[0056] (2) Before the substrate is placed in the vacuum chamber, it is ultrasonically cleaned with acetone and alcohol respectively, and the pressure of the vacuum chamber is pumped down to less than 5×10 before sputtering. -4 Pa, and filled with argon for pre-sputtering for 3 minutes to clean the target surface. Nitrogen gas was then introduced, the total sputtering pressure was controlled at 2Pa, the ratio of nitrogen gas to argon gas was controlled at 3 / 1, the sputtering power was controlled at 120w, ...
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