Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor

A gas-sensitive membrane and sensor technology, applied in the direction of using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve the problems of high humidity response, poor gas permeability, affecting sensor sensitivity and selectivity, etc., and achieve fast response speed. , stable performance, fast reversible adsorption/desorption effect

Inactive Publication Date: 2013-02-20
TIANJIN UNIVERSITY OF TECHNOLOGY
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Problems solved by technology

The main disadvantage of these polymer films is that they have a large response to humidity, and most polymer materials ha

Method used

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  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor
  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor
  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor

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Embodiment Construction

[0024] The invention is suitable for the gas sensitive film of surface acoustic wave (SAW) and film bulk acoustic wave (FBAR) gas sensors, and adopts the calixarene / diamond-like structure. Calixarenes are prepared on the bottom as a diamond-like surface. in:

[0025] The diamond-like carbon is a hydrogen-containing diamond-like carbon film a-C:H (1). This a-C:H film contains more CHn (n=1-3) bonds, is hydrophobic, hardly absorbs water vapor in the atmosphere, and can eliminate interference responses caused by humidity; its thermal expansion coefficient is small (1×10 -6 / K), insensitive to temperature changes, and does not tend to vitrify.

[0026] The calixarene (2) is a class of macrocyclic supramolecular compounds bridged by phenol and methylene, and a single calixarene looks like a bottomless cup, forming a hydrophobic cavity inside which can accommodate guest molecules; The calixarene self-assembled on a hydrogen-containing diamond-like carbon film (a-C:H) via a hydrop...

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Abstract

The invention relates to a gas-sensitive film and a sensor which are applied to an FBAR (film bulk acoustic resonator) and an SAW (surface acoustic wave) sensor. The gas-sensitive film adopts a calixarene/hydrogen-containing diamond structure. The invention has the beneficial effect that the gas-sensitive film based on the calixarene/hydrogen-containing diamond structure has the advantages of high sensitivity, high response speed, high repeatability, good hydrophobicity, insensitivity to temperature variation and no tendency of glass transition compared with the current common nano molecular sieve type gas-sensitive film and microporous polymer gas-sensitive film.

Description

【Technical field】 [0001] The invention belongs to the intersection field of thin film electronic technology and sensing technology, in particular a gas sensitive film and sensor suitable for surface acoustic wave (SAW) and thin film bulk acoustic wave (FBAR) gas sensors. 【Background technique】 [0002] Accurate and rapid detection and identification of the types and contents of harmful gases is of great significance to the protection of people's quality of life. In the field of rapid real-time detection of harmful gases, gas sensors are more and more widely used. In this context, gas-sensitive membranes require high sensitivity, selectivity, and fast reversible adsorption / desorption to achieve real-time monitoring of the gas environment. [0003] In principle, the adsorption of the sensitive membrane to the measured molecules includes chemical adsorption, physical adsorption (van der Waals force), hydrogen bond force, weak intermolecular interaction force (C-H...π, π...π an...

Claims

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Application Information

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IPC IPC(8): G01N29/02
Inventor 杨保和张乾坤曾宪顺苏林徐晟
Owner TIANJIN UNIVERSITY OF TECHNOLOGY
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