Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor

A gas-sensitive membrane and sensor technology, applied in the direction of using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve the problems of high humidity response, poor gas permeability, affecting sensor sensitivity and selectivity, etc., and achieve fast response speed. , stable performance, fast reversible adsorption/desorption effect

Inactive Publication Date: 2013-02-20
TIANJIN UNIVERSITY OF TECHNOLOGY
View PDF3 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The main disadvantage of these polymer films is that they have a large response to humidity, and most polymer materials have a tendency to vitrify, which makes the gas permeability worse and affects the sensitivity and selectivity of the sensor.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor
  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor
  • Gas-sensitive film and sensor applied to FBAR (film bulk acoustic resonator) and SAW (surface acoustic wave) sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] The invention is suitable for the gas sensitive film of surface acoustic wave (SAW) and film bulk acoustic wave (FBAR) gas sensors, and adopts the calixarene / diamond-like structure. Calixarenes are prepared on the bottom as a diamond-like surface. in:

[0025] The diamond-like carbon is a hydrogen-containing diamond-like carbon film a-C:H (1). This a-C:H film contains more CHn (n=1-3) bonds, is hydrophobic, hardly absorbs water vapor in the atmosphere, and can eliminate interference responses caused by humidity; its thermal expansion coefficient is small (1×10 -6 / K), insensitive to temperature changes, and does not tend to vitrify.

[0026] The calixarene (2) is a class of macrocyclic supramolecular compounds bridged by phenol and methylene, and a single calixarene looks like a bottomless cup, forming a hydrophobic cavity inside which can accommodate guest molecules; The calixarene self-assembled on a hydrogen-containing diamond-like carbon film (a-C:H) via a hydrop...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a gas-sensitive film and a sensor which are applied to an FBAR (film bulk acoustic resonator) and an SAW (surface acoustic wave) sensor. The gas-sensitive film adopts a calixarene / hydrogen-containing diamond structure. The invention has the beneficial effect that the gas-sensitive film based on the calixarene / hydrogen-containing diamond structure has the advantages of high sensitivity, high response speed, high repeatability, good hydrophobicity, insensitivity to temperature variation and no tendency of glass transition compared with the current common nano molecular sieve type gas-sensitive film and microporous polymer gas-sensitive film.

Description

【Technical field】 [0001] The invention belongs to the intersection field of thin film electronic technology and sensing technology, in particular a gas sensitive film and sensor suitable for surface acoustic wave (SAW) and thin film bulk acoustic wave (FBAR) gas sensors. 【Background technique】 [0002] Accurate and rapid detection and identification of the types and contents of harmful gases is of great significance to the protection of people's quality of life. In the field of rapid real-time detection of harmful gases, gas sensors are more and more widely used. In this context, gas-sensitive membranes require high sensitivity, selectivity, and fast reversible adsorption / desorption to achieve real-time monitoring of the gas environment. [0003] In principle, the adsorption of the sensitive membrane to the measured molecules includes chemical adsorption, physical adsorption (van der Waals force), hydrogen bond force, weak intermolecular interaction force (C-H...π, π...π an...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N29/02
Inventor 杨保和张乾坤曾宪顺苏林徐晟
Owner TIANJIN UNIVERSITY OF TECHNOLOGY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com