Broadband vector hydrophone with glass fiber reinforced plastics acoustic transmission cap package

Abstract

The invention relates to a broadband vector hydrophone with a glass fiber reinforced plastics acoustic transmission cap package, and solves the problems that current hydrophone is narrower in frequency response range and larger in frequency response curve fluctuation. A metal tube shell of a signal processing circuit board is built in the hydrophone. A chip vibration damping support body is arranged on the top face of the metal tube shell. The chip vibration damping support body is provided with a four-beam sensitive micro-structure and a sensitive column. The acoustic transmission cap is fixed on the metal tube shell. The four-beam sensitive micro-structure, the sensitive column and the chip vibration damping support body are packaged in the acoustic transmission cap which is filled with a medium: silicon oil. The hydrophone is improved in the aspect of materials of the acoustic transmission cap, and a glass fiber reinforced plastics material replaces current polyurethane material. Under the circumstance that the sensitivity of the vector hydrophone is not affected, the frequency band of the hydrophone is expanded, the frequency response is improved, and the performance index of the hydrophone is greatly improved. The broadband vector hydrophone has a good application prospect.

Description

Technical field [0001] The invention relates to a MEMS bionic vector hydrophone, in particular to a broadband vector hydrophone based on a glass fiber reinforced plastic acoustic cap encapsulation. Background technique [0002] In recent years, in underwater acoustic measurement systems, the use of vector hydrophones has improved the system’s anti-interference ability and line spectrum detection capabilities. Therefore, the research work of vector hydrophones has received great attention from researchers at home and abroad. The Chinese invention patent No. 200810079372.0 "Packaging structure of micro-nano bionic vector hydrophone", introduced the MEMS vector hydrophone package using polyurethane sound-transmitting cap, its bandwidth response is narrow (40Hz-800Hz), water The frequency response curve of the listener has relatively large fluctuations and is not flat enough, which hinders its further engineering application. The reason is analyzed because the elastic modulus of the...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a wide-band vector hydrophone packaged based on a glass fiber reinforced plastic sound-permeable cap in order to solve the problems of the existing hydrophones with narrow frequency response range (40Hz-800Hz) and large frequency response curve fluctuations.

The sound-permeable cap in the packaging structure of the hydrophone of the present invention is made of glass fiber reinforced plastics, which solves the problems of the narrow frequency band of the hydrophone and large fluctuations in the frequency response curve, and improves the underwater sound detection performance of the hydrophone

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