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Detection plate group gluing method and clamp

A detection board and fixture technology, which is applied in the field of lithography machines, can solve the problems of low processing yield, high risk, and cannot meet the requirements of 90nm lithography machines, and achieves the effect of improving product qualification rate and reducing production costs.

Active Publication Date: 2014-08-20
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the board body of the domestic processing detection board needs to purchase the standard board body after coating abroad, and the processing process requires high anti-pollution treatment, which makes the processing yield low and the risk is high, which is far from meeting the requirements of 90nm lithography machines.

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  • Detection plate group gluing method and clamp
  • Detection plate group gluing method and clamp
  • Detection plate group gluing method and clamp

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Embodiment Construction

[0046] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0047] In order to prevent the influence of the temperature and humidity of the workshop where the gluing is located on the solution of the gluing, the clean room temperature is 20-26 ℃ ± 0.1 ℃, the humidity is 50-70%, and it is carried out under standard atmospheric pressure;

[0048] 1. Make the coating surface of the coating detection reference plate and the protective glass of the reference plate free of pollution or impurities as much as possible;

[0049] solution

[0050] Wiping needs to open the coating detection reference plate in a clean workbench in a clean room of at least 10,000 grades, wear anti-static gloves and a mask, put the coating detection reference plate and the reference plate protection glass under 100w light and carefully watch the dust on the surf...

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Abstract

A method and clamp for gluing a detection board assembly. The method for gluing a detection board assembly includes: ① setting an ultraclean workroom and an ultraclean workbench; ② wiping a reference board protective glass cover (6) satisfying requirements on the ultraclean workbench with a piece of antistatic optical glass wiping cloth dipped with ethanol; ③ bonding a protective film (8) onto the coated surface of a coated detection reference board (7); and ④ gluing the coated detection reference board (7) bonded with the protective film (8) and the reference board protective glass cover (6) into a waterproof detection board assembly.The method and clamp for gluing a detection board assembly ensure that a coating mark region is in no contact with a contamination source in the machining process, reducing the reject rate; and the machined detection board meets the high quality requirement of a stepper.

Description

technical field [0001] The invention relates to a lithography machine, in particular to a gluing method and a jig for a detection plate set of a step projection lithography machine. The detection plate is mainly used for position alignment of detection marks of the step projection lithography machine. The results directly affect the automatic alignment of the silicon wafer in the step-by-step projection lithography machine to the bit grating. Background technique [0002] At present, the coating process of the detection board processing in European and American countries is arranged after the parts processing. The detection board processing does not pollute the coating marking area, and the gluing has no influence on the processing shape of the parts. The surface shape of the datum surface can easily reach the requirement of 0.003mm, and the parallelism of the upper and lower surfaces is less than 0.006mm. However, the board body of the domestic processing detection board n...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G03F9/00
CPCH01L21/00G03F7/20G03F1/82
Inventor 黄克飞魏向荣顾亚平
Owner SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT