Determination method of silicon dioxide, silicon and silicon carbide in waste mortar from silicon wafer cutting

Abstract

The invention discloses a determination method of silicon dioxide, silicon and silicon carbide in waste mortar from silicon wafer cutting. The method comprises steps of sample pretreatment, sample reaction, sample coloration, determination of silica content and determination of silicon carbide content. A spectrophotometer method and a gravimetric method are combined in the method to finish the determination; and contents of silicon dioxide, silicon and silicon carbide in cutting waste mortar are calculated through formulas. The invention has characteristics of high precision, high accuracy, low cost and convenient operation, and is suitable for determination of contents of silicon dioxide, silicon and silicon carbide in waste mortar from silicon wafer cutting.

Description

technical field [0001] The invention relates to the field of recycling waste mortar for cutting silicon wafers in the solar energy and electronics industries, in particular to a method for measuring silicon dioxide, silicon and silicon carbide in the waste mortar for cutting silicon wafers in the solar energy and electronics industries. Background technique [0002] As an important photoelectric material and semiconductor material, silicon element accounts for almost 50% of the cost. In the actual processing process, it is necessary to wire-cut the single silicon body to make silicon wafers that meet the requirements, so it is inevitable that a certain amount of silicon (with a content as high as 50%~52%) enters the cutting in the form of wear and drop. in the liquid. As the silicon content in the cutting fluid increases, the cutting efficiency decreases, and eventually the cutting fluid cannot meet the cutting requirements to form waste mortar. Its composition is generally...

AI Technical Summary

Problems solved by technology

This method has high operational requirements, and the platinum crucible used is expensive, and is only suitable for the determination of the chemical composition of silicon carbide abrasives and crystal blocks with a silicon carbide content of not less than 95%.

Because the silicon carbide content in silicon wafer cutting waste mortar is generally much lower than 95%, the national standard GB / T3045-2003 cannot meet the actual determination of silicon dioxide, silicon and silicon carbide content

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