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Single stage focusing wave zone plate and manufacturing method thereof

A zone plate and single-stage technology, which is applied in the field of single-stage focusing zone plate and its manufacturing, can solve the problems of inability to manufacture suitable Gabor zone plate and limit the manufacturing precision of zone plate, and achieve the production accuracy, which is easy to control and improve Monochrome performance, flexible effects

Inactive Publication Date: 2013-04-17
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the usual practice cannot be used to make Gabor zone plates suitable for X-ray bands
[0004]In 1992, Beynon and KirK et al. proposed a workaround for making X-ray Gabor zone plates (Gabor zone plate with binary transmittance values, Optics Letters, T. D. Beynon, I. Kirk and T. R. Mathews), this method gives the Gabor zone plate the characteristics of the binary optical transfer function, thus greatly reducing the difficulty of making the Gabor zone plate, but the Gabor zone plate designed by this method There are a large number of sharp corners of different sizes in the film, and the existence of a large number of sharp corners directly limits the manufacturing accuracy of the zone plate

Method used

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  • Single stage focusing wave zone plate and manufacturing method thereof
  • Single stage focusing wave zone plate and manufacturing method thereof
  • Single stage focusing wave zone plate and manufacturing method thereof

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Embodiment 1

[0041] To this end, this embodiment discloses a single-stage focusing zone plate suitable for the visible light band, refer to figure 1 and figure 2 shown, including:

[0042] Transparent silicon carbide substrate;

[0043] Multiple tantalum (Ta) opaque primitives on a transparent substrate.

[0044] In the present invention, for visible light, the material of the transparent substrate can also be light-transmitting materials such as ordinary glass or plexiglass, and the opaque material can also be opaque metals such as gold, aluminum or copper.

[0045] Wherein, the basic element may be tantalum (Ta), gold (Au), nickel (Ni) or other materials that can block electromagnetic waves of a certain band. The primitive can be one of polygons such as hexagon, circle, sector or other arbitrary shapes. Preferably, the primitive is a regular hexagon with the same size, such as figure 1 Shown is the single-stage focusing zone plate of the present invention at radius The distribut...

Embodiment 2

[0060] This embodiment discloses a single-stage focusing zone plate structure suitable for the THz band. The radius of the innermost ring of the single-stage focusing zone plate is 40mm, the width of the outermost ring is 2.8427mm, and the shape of the primitive is a regular hexagon (the The side length is 2mm), the ring number of the zone plate is 50, the total size of the single-stage focusing zone plate is 568 mm×568 mm; the wavelength of the incident light is 600 μm, so it can be seen that the corresponding focal length is m.

[0061] The structure of the single-stage focusing zone plate of the present invention has been described in detail above. In order to better understand the single-stage focusing effect of the present invention, the following will theoretically simulate the focusing characteristics of the single-stage focusing zone plate of the present invention. Refer to Figure 8 and Figure 9 shown. Figure 8 and Figure 9 are the diffracted light intensity di...

Embodiment 3

[0063] This embodiment discloses a single-stage focusing zone plate structure suitable for the soft X-ray band. The radius of the innermost ring of the single-stage focusing zone plate is 70 μm, the width of the outermost ring is 4.977 μm, and the shape of the primitive is a regular hexagon. (Its side length is 100nm), the number of zone plate rings is 50, the total size of the single-stage focusing zone plate is 990μm×990μm; the wavelength of the incident light is 6nm, so it can be seen that the corresponding focal length is cm.

[0064] The structure of the single-stage focusing zone plate of the present invention has been described in detail above. In order to better understand the single-stage focusing effect of the present invention, the following will theoretically simulate the focusing characteristics of the single-stage focusing zone plate of the present invention. Refer to Figure 10 and Figure 11 shown. Figure 10 and Figure 11 are the diffracted light intensit...

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Abstract

The invention provides a single stage focusing wave zone plate and a manufacturing method thereof. The single stage focusing wave zone plate comprises a transparent substrate and a plurality of light-proof elements arranged on the transparent substrate, wherein the light-proof element number densities are in cosine distribution and sinusoidal distribution along a radial direction, namely that the light-proof elements are in ring-shaped zonal distribution, and are in random distribution along the ring-shaped zones; the diameter of each ring-shaped zone is rm, wherein rm2 is equal to mf lambda +m2 lambda 2 / 4, lambda is wavelength, f is focal length and m is the number of rings; the shapes of the light-proof elements can be as follows: a hexagon, a round, a sector or any one of other shapes. The single stage focusing wave zone plate provide by the invention only has a pair of conjugated focal points, so that the interference and the error brought by high-order diffraction can be eliminated; and meanwhile, a light transmission region and a light-proof region only exist in a single stage focusing wave zone plate which is in a binaryzation structure, and is easy to manufacture. The single stage focusing wave zone plate provided by the invention has the characteristics of capability of being used as a focal point, an imaging element or a single color device wavelength selective element.

Description

technical field [0001] The present invention relates to zone plate technology, more specifically, to a single-stage focusing zone plate and its manufacturing method. Background technique [0002] In 1871, Rayleigh invented the Fresnel zone plate (Optics, Addison-Wesley, E. Hecht and A. Zajac), which is similar to a lens and has the properties of focusing and imaging. The Fresnel zone plate is composed of concentric annular zones whose linear density gradually increases from the inside to the outside along the radial direction. These concentric circular zones are also called half-wave zones. The areas of each half-wave zone are equal, and adjacent even half The optical path difference between the corresponding part of the wave band or odd half-wave band to the focal point is equal to the wavelength of the incident light. When the electromagnetic wave is incident on the surface of the zone plate, after diffraction, the zone plate will change the amplitude and phase of its ele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
Inventor 曹磊峰范伟高宇林魏来谷渝秋张保汉
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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