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Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure

A vector hydrophone and microstructure technology, which is applied in microstructure technology, microstructure devices, instruments, etc., can solve the problems of low orientation accuracy, insufficient spatial resolution force, and starboard and starboard blur of a single vector hydrophone. Achieve the effect of low power consumption, strong spatial resolution, and elimination of blurring problems

Active Publication Date: 2013-04-24
ZHONGBEI UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to provide a microstructure of quadruple array MEMS vector hydrophone in order to solve the problems of low orientation accuracy of existing single vector hydrophone, insufficient spatial resolution, blurring of left and right sides, etc.

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  • Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure
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  • Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with accompanying drawing:

[0022] Such as figure 1 , 2 , Shown in 3, a kind of quaternary array MEMS vector hydrophone microstructure, including the square substrate 1 that takes silicon as material, take the center of the square substrate 1 as the coordinate origin and along the two groups of opposite sides of the square substrate 1 The XOY coordinate system is established in the direction of the centerline of the square substrate 1. In the four quadrants of the XOY coordinate system on the square substrate 1, the hollow cross-shaped cantilever beam 2 and the four cross-shaped cantilever beams with the same structural size are respectively etched by ICP plasma etching technology. The intersection of the center of 2 is etched into a circular piece 3, and a micro columnar body 4 with the same or similar density as the water density is fixed vertically on the circular piece 3, and each single beam of...

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Abstract

The invention provides a quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure. The quaternary array MEMS vector hydrophone microstructure comprises a square substrate, wherein four cross-shaped cantilever beams are etched on the square substrate, a minitype cylindrical object is fixed in the center of each cross-shaped cantilever beam, and voltage dependent resistors are arranged on the cross-shaped cantilever beams. Included angles between the four cross-shaped cantilever beams and the square substrate are different with each other and are respectively 0 degree, 30 degrees, 45 degrees and 60 degrees. The quaternary array MEMS vector hydrophone microstructure is made through the MEMS technology and has the advantages of being highly sensitive, low in energy consumption and micro in size. Compared with the single vector hydrophone, a hydrophone made of the quaternary array MEMS vector hydrophone microstructure is high in directional accuracy, strong in space resolution ratio power and capable of solving the problem of port and starboard ambiguity. Compared with the traditional hydrophone array, the size of the array of the quaternary array MEMS vector hydrophone microstructure is greatly reduced. The quaternary array MEMS vector hydrophone microstructure is integrally formed through the MEMS technology, high consistency exists among array elements, and burden on calculation of sequential arithmetic is lightened.

Description

technical field [0001] The invention relates to a MEMS vector hydrophone, in particular to a microstructure of a four-element array MEMS vector hydrophone. Background technique [0002] Vector hydrophone, as a sensor capable of measuring the vector information of underwater sound field with time synchronization and space co-point, has a wide application prospect in ocean engineering and ocean development. The vector hydrophone developed based on MEMS technology is gradually becoming miniaturized and integrated. Single-vector hydrophones developed using MEMS technology can already perform target orientation functions. For example, a "resonance tunneling bionic vector underwater acoustic sensor" disclosed in the Chinese invention patent No. 200610012991.0 realizes the two-dimensional detection of underwater acoustic signals In-plane orientation detection. However, with the further research, it is found that although a single vector hydrophone can orient space targets, the re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01S5/20B81B7/00
Inventor 张国军李振薛晨阳宋晓鹏张文栋
Owner ZHONGBEI UNIV
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