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Fabrication method of optical micro-nano biosensor integrated with microfluidic system

A microfluidic system and biosensor technology, applied in the field of biosensors, can solve the problems of high bonding time requirements, difficult alignment and bonding operations, and increase the difficulty of alignment and bonding, and achieve the effect of simplifying the operation difficulty.

Inactive Publication Date: 2013-05-01
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

These methods require accurate alignment and bonding of the microfluidic channel and the on-chip device, but since the micro-nano optical devices are all in the sub-micron size, the alignment and bonding operation is very difficult. Higher, which increases the difficulty of alignment bonding

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0030] Such as figure 1 as shown, figure 1 It is a flowchart of a method for making an optical micro-nano biosensor integrated with a microfluidic system according to an embodiment of the present invention, the method includes the following steps:

[0031] Step 1: Take a substrate 10, clean it, dry it, and apply adhesive and photoresist in sequence;

[0032] Step 2: exposing on the top layer of the substrate 10 to complete the definition of the device pattern;

[0033] Step 3: Etching and removing the glue on the developed substrate 10 to obtain a micro-nano planar waveguide optical device array chip 11;

[0034] Step 4: Pre-baking the micro-nano planar waveguide optical device array chip 11, spin-coating SU8 glue 12 o...

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Abstract

The invention discloses a fabrication method of an optical micro-nano biosensor integrated with a microfluidic system. The method comprises the steps that a substrate is cleaned; a micro-nano slab-guide optical device is fabricated through photoetching, developing, etching, and the like on the top layer of the substrate; the surface of the device is coated with SU-8 thick glue in a spinning manner; an SU-8 glue microfluidic channel is obtained through alignment exposure, postbaking, developing, and the like; an SU-8 layer is coated and permanently bonded with a PDMS (polydimethylsiloxane) sheet, so that the integration of the micro-nano slab-guide optical device with a microfluidic is achieved; a relevant reagent is injected from a liquid inlet; chemical modification of a micro-ring region is completed; a reagent solution to be tested is injected; and a function of on-chip biological detection is achieved by observing variations of optical power or resonance. The method has the advantages of simplicity in operation and high reliability, and is suitable for fabricating the microfluidic systems of the most slab-guide micro-nano optical biosensors.

Description

technical field [0001] The invention relates to the technical field of biosensors, in particular to a method for manufacturing an optical micro-nano biosensor integrated with a microfluidic system based on the principle of evanescent light wave detection. Background technique [0002] A biosensor is a combination of bioactive materials and corresponding transducers, which can convert the changes caused by the analyte into physical signals for characterization, and realize the determination of biological substances. Biosensors are not only an indispensable analytical method and detection method in the field of biotechnology, but also closely related to environmental monitoring, food hygiene, disease detection, and drug development. Compared with thermal / acoustic / electrical biosensors, optical biosensors have the characteristics of high sensitivity, strong anti-electromagnetic interference, and low noise, and have great development prospects. [0003] Planar waveguide micro-n...

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Application Information

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IPC IPC(8): G01N21/00G03F7/00
Inventor 孙英男韩伟静魏清泉李运涛俞育德周晓光
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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