Trimming resistor and preparation method thereof

Abstract

The invention provides a trimming resistor comprising a semiconductor substrate, a dielectric layer arranged on the semiconductor substrate, a fuse trimming shape arranged on the dielectric layer through deposit of a fuse, and a passivation layer, wherein the fuse trimming shape comprises a fusing area and two ends, a trimming structure capable of changing current density is arranged in the fusing area, and the two ends of the fuse trimming shape are respectively provided with connecting pads. The passivation layer is formed on the fuse trimming shape and the dielectric layer, and provided with a trimming window corresponding to the trimming structure and pressing point windows respectively corresponding to the connecting pads. The invention further provides a preparation method of the trimming resistor. Due to the fact that the fuse trimming shape is provided with the trimming structure capable of changing the current density in the fusing area, the effective cross section area of the fuse on the trimming structure is small, the current density is large, the fusing position is fixed, the fusing area is small, and meanwhile an opening of the trimming window on the fuse is small so as to reduce reliability risks caused by metal residue, chemical residue and the like due to the fact that the trimming window on the trimming resistor is too large.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing technology, and in particular relates to a trimming resistor and a manufacturing method thereof. Background technique [0002] Integrated circuit layout design is usually relatively standardized and idealized. In the actual manufacturing process, it is affected by factors such as manufacturers, process methods, process fluctuations, and test conditions, resulting in errors in the expected dimensions and electrical functions of the design. For products that need to adjust the reference voltage and reference frequency, the current limiting and voltage dividing functions of resistors are widely used in analog circuits, but the resistance value is affected by the doping concentration and diffusion degree, and the error can reach ±20%. Such a large error Can not meet the requirements of high-precision circuits. In order to eliminate the impact of factors such as manufacturers, proc...

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Problems solved by technology

[0008] Therefore, in the traditional metal fuse trimming resistor, since any position of the entire trimming metal may become the most preferential fusing point during the trimming process, the trimming metal is prone to over-trimming and the entire metal is trimmed. , Insufficient repair and adjustment, and various situations of repair and adjustment failure; in addition, because the fusing point is not fixed, the amount of fusing is different, and the required test conditions are also different, which undoubtedly makes the debugging of the test conditions a lot more difficult. The accuracy and accuracy cannot be well guaranteed, resulting in more failed dies; at the same time, the pressure point window on the trimming metal is too large or too small will affect the trimming effect, increasing reliability risks, etc.

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