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Graphite boat pretreatment method

A graphite boat and pretreatment technology, used in gaseous chemical plating, coatings, electrical components, etc., can solve the problems of increasing pretreatment time, breaking silicon wafers, increasing the cost of graphite boat pretreatment, and reducing pretreatment. time, the effect of reducing the cost of preprocessing

Inactive Publication Date: 2013-06-19
JETION SOLAR HLDG
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Problems solved by technology

During the research and practice of the prior art, the inventors of the present invention have found that a large number of silicon wafers need to be inserted before the pre-deposition of the graphite boat, which not only increases the pre-treatment time, but also often breaks the silicon during the pre-deposition process. sheets, increasing the cost of graphite boat pretreatment

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Embodiment Construction

[0023] The embodiment of the present invention provides a graphite boat pretreatment method, which can reduce the pretreatment time and reduce the pretreatment cost of the graphite boat. The details will be described below.

[0024] refer to figure 1 , an embodiment of the graphite boat pretreatment method provided by the embodiments of the present invention includes:

[0025] 101. Dry the cleaned graphite boat.

[0026] The graphite boat is used in the PECVD process of the solar cell manufacturing process. The solar cell is placed in the graphite boat to deposit the silicon nitride film. In order to prevent the graphite boat from absorbing silicon nitride, the graphite boat must first be treated with Pre-deposition, coating the graphite boat with a silicon nitride film;

[0027] In the process of producing solar cells, after the graphite boat is used for a certain number of times, such as 150 times, it needs to be cleaned. Hydrofluoric acid is used during cleaning, which w...

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Abstract

The invention discloses a graphite boat pretreatment method. According to the invention, washed graphite boat is bake-dried; the dried graphite boat is directly subjected to pre-deposition, such that a graphite boat with silicon nitride deposited on the surface is obtained. According to the graphite boat pretreatment provided by the embodiment of the invention, the graphite boat is not needed to be inserted with a silicon chip before graphite boat pre-deposition, such that graphite boat pretreatment time is reduced, and graphite boat pretreatment cost is reduced.

Description

technical field [0001] The invention relates to the technical field of solar cell production, in particular to a graphite boat pretreatment method. Background technique [0002] In the process of making solar cells, Plasma Enhanced Chemical Vapor Deposition (PECVD, Plasma Enhanced Chemical Vapor Deposition) anti-reflection coating is a very important process. PECVD anti-reflection coating is mainly to deposit silicon nitride on the surface of silicon wafers. The main purpose of this process is to reduce the reflection loss of the solar cell surface to sunlight, increase the minority carrier lifetime, and improve the photoelectric conversion efficiency of the solar cell. [0003] PECVD deposition of silicon nitride is an already mature process. Graphite boats are the carrier for silicon nitride deposition on silicon wafers. The graphite boats need to be cleaned after being used for a certain number of times, but the cleaned graphite boats need to be pretreated. In order to a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/34C23C16/505H01L31/18
CPCY02P70/50
Inventor 钱明星
Owner JETION SOLAR HLDG
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