Preparation method and device of phosphorus-doped nano silicon material
A nano-material and nano-silicon technology, which is applied in the direction of silicon, can solve the problems of uneven size of nanoparticles, low production capacity of nanoparticles, and difficulty in avoiding cross-contamination of chemical components, so as to increase the area, improve the uniformity, and increase the production capacity. Effect
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[0033] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and four preferred embodiments.
[0034] Device example:
[0035] like figure 1 and figure 2 Shown: a device for preparing nanoparticles by controllable spark discharge, including a cavity 1 for accommodating spark discharge, one end of the cavity 1 is connected to a pipeline for a dielectric material 8 to enter, and the other end is connected to a particle collector through a valve 9 10. It also includes a first electrode 2 placed in the cavity 1, a second electrode 4, and a power supply 6 connected to the first electrode 2 and the second electrode 4; the first electrode 2 is connected with a A rotating rotary motor 3, the second electrode 4 is connected with a stepper motor 5 that moves the second electrode 4 back and forth.
[0036] The first electrode 2 is a block of nanomaterials to be prepared, and the shape is a cylinder.
[0037] The s...
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