Multi-channel micro-fluidic chip and mass spectrum combined device
A microfluidic chip, multi-channel technology, applied in measurement devices, laboratory containers, material analysis by electromagnetic means, etc. Application limitations and other issues, to achieve the effect of promoting wide application, simple and easy method, and high sensitivity
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[0033] The present invention will be further described below in conjunction with accompanying drawing, but the present invention is not limited to following embodiment
[0034] The microfluidic chip in the present invention is manufactured by soft photolithography, and multiple exposures are adopted according to specific needs. The specific preparation method is as follows: immerse the silicon wafer in a mixed solution of sulfuric acid and hydrogen peroxide (the ratio of sulfuric acid to hydrogen peroxide is 3:1), heat it, slightly boil it for 40 minutes, then wash and dry the silicon wafer. A layer of SU-82050 photoresist is coated on the surface of the silicon wafer with a coater, and the thickness of the photoresist can be adjusted by controlling the rotation speed, thereby controlling the height of the corresponding channel in the fabricated microfluidic chip. For example figure 1 In the specific example shown, the chip channel structure is used for generating concentrati...
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