Dye adsorption device, dye adsorption method, and substrate treatment apparatus

Abstract

[Problem] To significantly reduce processing time of a step of adsorbing dye in a porous semiconductor layer on a substrate surface. [Solution] A flow of a dye solution is formed in a gap between solution guide surface (92L, 92R) of a nozzle (20) and a substrate (G) during the treatment, and a porous semiconductor layer of a treated surface of the substrate is subject to dye adsorption treatment in this flow of the dye solution. Furthermore, impact pressure from slit-like discharge openings (88L, 88R) and pressure of turbulent flow in groove-like uneven sections (92L, 92R) act in the vertical direction in addition to the flow of the dye solution. Thus, aggregation and association of the dye are hardly caused on a surface part of the porous semiconductor layer of the treated surface of the substrate, the dye efficiently penetrates deeply into the porous semiconductor layer, and the dye adsorption into the porous semiconductor layer proceeds at high speed.

Description

technical field [0001] The present invention relates to a dye adsorption device, a dye adsorption method, and a substrate processing device for adsorbing a dye to a porous semiconductor layer formed on a surface of a substrate. Background technique [0002] In recent years, dye-sensitized solar cells are expected to become low-cost solar cells in the future. Such as Figure 20 As shown, as a basic structure, a dye-sensitized solar cell includes a porous semiconductor layer 204 and an electrolyte layer 206 that support a sensitizing dye between a transparent electrode (cathode) 200 and a counter electrode (anode) 202 . [0003] Among them, the semiconductor layer 204 is divided into units of battery cells (cell) together with the transparent electrode 200 , the electrolyte layer 206 , and the counter electrode 202 , and is formed on the transparent substrate 208 through the transparent electrode 200 . The inner side of the counter electrode 202 is covered with the counter su...

AI Technical Summary

Problems solved by technology

[0007] The dye adsorption treatment time of the above-mentioned dipping method varies depending on the type of dye, but it takes at least tens of hours. In the manufacturing process of dye-sensitized solar cells, the takt of the entire process is limited. thus becoming a cause of reduced production efficiency

To solve this problem, a method of operating a plurality of dipping-type dye adsorption devices in parallel is considered, but it is not practical to prepare at least dozens of devices.

Images