Unlock instant, AI-driven research and patent intelligence for your innovation.

A polymer bimaterial microbeam and its temperature-sensitive structure

A polymer, dual-material technology, applied in the direction of material expansion/contraction thermometers, thermometers, measuring devices, etc., can solve the problems of complex manufacturing process, reduced temperature sensitivity of polymer dual-material microbeams, poor processing technology compatibility, etc. , to achieve the effect of high temperature sensitivity and resolution

Inactive Publication Date: 2015-09-23
TSINGHUA UNIV
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in related reports, the temperature sensitivity of the 100μm-long polymer dual-material microbeam is only 111nm / K, and there is still a lot of room for improvement.
In addition, the manufacturing process of the polymer layer in the dual-material microbeam is complex (such as plasma-enhanced vapor-phase chemical deposition), which is poorly compatible with the processing technology of micro-mechanical electronic systems (MEMS)
Moreover, during the design and fabrication of bimaterial microbeams, the thickness ratio of the two layers of materials is not optimized, which reduces the temperature sensitivity of polymer bimaterial microbeams.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A polymer bimaterial microbeam and its temperature-sensitive structure
  • A polymer bimaterial microbeam and its temperature-sensitive structure
  • A polymer bimaterial microbeam and its temperature-sensitive structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] The schematic diagram of the temperature-sensitive structure of the polymer dual-material microbeam of the present invention is as follows figure 2 As shown, it is mainly composed of a fixed structure 2, a polymer film 3 and a film 4 (metal). The present invention selects polyvinyl chloride (PVC) as a material with a large thermal expansion coefficient, and selects aluminum (Al) as a material with a small thermal expansion coefficient.

[0041] The configuration of the polyvinyl chloride solution is as follows: First, dissolve 3.2g of polyvinyl chloride powder A into 40mL of tetrahydrofuran (THF) B, ultrasonicate for 2 hours, and then put it in a centrifuge (2500rpm) to remove particles and obtain PVC solution C .

[0042] figure 2 The preparation process of PVC / Al bimaterial microbeams in image 3shown. First, spin-coat a layer of PVC solution C on the glass substrate 5 (the spinning speed is 1800rpm), leave it at room temperature for 30 minutes and then dry it a...

Embodiment 2

[0045] The difference between this embodiment and embodiment 1 is: figure 2 Polystyrene (PS) is used in the polymer film 3 . Dissolve 4 g of polystyrene particles A in 40 mL of toluene solvent B to form polystyrene solution C. The preparation process of the PS / Al dual material in this embodiment is the same as that in Embodiment 1.

[0046] The length of the PS / Al dual-material microbeam obtained in the present invention is 400 μm, the width is 30 μm, the thickness of PS is 1.5 μm, the thickness of Al is 0.25 μm, and the thickness ratio of the two layers of materials is 6:1.

Embodiment 3

[0048] The difference between this embodiment and embodiment 1 is: figure 2 Polyvinylidene fluoride (PVDF) is used in the polymer film 3. Dissolve 3.2 g of polyvinylidene fluoride powder A in 40 mL of dimethylacetamide (DMAc) solvent B to form polyvinylidene fluoride solution C. The preparation process of the PVDF / Al dual material in this embodiment is the same as that in Embodiment 1.

[0049] The length of the PVDF / Al dual-material microbeam obtained by the present invention is 500 μm, the width is 40 μm, the thickness of PVDF is 1.7 μm, the thickness of Al is 68 nm, and the thickness ratio of the two layers of materials is 25:1.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
sizeaaaaaaaaaa
lengthaaaaaaaaaa
lengthaaaaaaaaaa
Login to View More

Abstract

The invention relates to the field of temperature sensing elements, in particular to a polymer bi-material micro-beam and a temperature sensitive structure. The polymer bi-material micro-beam comprises a polymer film (3) and a film (4); a thermal expansion coefficient of the polymer film (3) is higher than a thermal expansion coefficient of the film (4), and the difference between the thermal expansion coefficient of the polymer film (3) and the thermal expansion coefficient of the film (4) is larger than 20 ppm / K; the polymer film (3) is made of a polymer with a thermal expansion coefficient larger than 60ppm / K; and the film (4) is made of metal, a silica-base material or a polymer with a thermal expansion coefficient smaller than 40ppm / K. The polymer bi-material micro-beam and the temperature sensitive structure have the advantages that thermally induced displacement or a thermally induced turn angle of the tail end of the micro-beam is increased by the aid of the large thermal expansion coefficient of the polymer and an optimized bi-material thickness ratio, so that the sensitivity and the resolution are improved; and the temperature sensitive structure is simple in manufacturing process, low in cost, small in boundary dimension, high in sensitivity and applicable to arrays.

Description

technical field [0001] The invention relates to the field of temperature sensing elements, in particular, the invention relates to a polymer bimaterial microbeam and a temperature sensitive structure. Background technique [0002] Currently, bimaterial beams made of two materials with different thermal expansion coefficients have been widely used as thermal actuators and temperature sensors. Its working principle is: when the temperature of the environment where the double-material beam is located changes, the temperature of the two layers of materials that make up the beam also changes. Due to the different thermal expansion coefficients, the thermal elongation (or shortening) of the two layers of materials is different. , causing the bimaterial beam to bend. As a thermal actuator, the thermally induced bending of the bimaterial beam is expressed as an output of force or displacement to the outside world; as a temperature sensor, the thermally induced bending of the bimate...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01K5/48
Inventor 叶雄英商院芳冯金扬
Owner TSINGHUA UNIV