Polycrystalline silicon ingot furnace and method for preparing polycrystalline silicon ingot with even and fine crystalline grains
A polysilicon ingot casting furnace and polysilicon technology, applied in the field of solar cells, can solve the problems affecting the verticality, impact, and defects of polysilicon ingots, etc.
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Embodiment 1
[0040] like figure 2 as shown, figure 2 It is a schematic structural diagram of a polysilicon ingot casting furnace, which includes: a heat insulation cage lifting mechanism 1, an upper furnace body 2, a heat insulation cage 3, a crucible assembly 4, a directional coagulation aid block 5, a lower furnace body 6, a support A column 7, an ultrasonic generator 8, the ultrasonic generator 8 is arranged at the bottom of the outer wall of the lower furnace body 6.
Embodiment 2
[0042] Load the polysilicon material to the inner wall coated with Si 3 N 4 In the quartz crucible, place the crucible on the hollow graphite block, that is, the directional coagulation aid block (DS block); then, close the lower furnace chamber for vacuuming operation, and heat up after the system completes the leak detection operation; the surrounding and top of the crucible A heater is installed, and the silicon material is heated after the power is turned on. The heating process lasts for 15 hours until the silicon material is completely melted, and then the heat insulation cage is used to raise the position of the heat insulation cage to accelerate the heat from the directional coagulation. The speed of outward diffusion will cool it, thereby indirectly taking away the heat in the crucible, and finally form a bottom-up vertical temperature gradient in the silicon solution; under the action of this temperature gradient, the silicon material will start to solidify from the ...
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