Mach-Zehnder electro-optic modulator in rectangular structure
An electro-optical modulator and Mach technology, applied in the field of integrated optics, can solve the problems of long scale, large single chip size, unfavorable number of integrated discrete components, etc., and achieve the effects of reduced size, easy expansion and integration, and efficient and compact device structure
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[0017] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention should not be limited thereby.
[0018] A Mach-Zehnder electro-optic modulator with a rectangular structure of the present invention can be fabricated on one of silicon, silicon on insulator (SOI), GeSi / Si, GaAs, GaAs / AlGaAs and InP / InGaAsP semiconductor substrate materials on a base material. As an example of specific implementation, the rectangular Mach-Zehnder electro-optic modulator of the present invention is prepared on SOI material. The electro-optical modulation of silicon materials is based on the free carrier plasma dispersion effect of silicon, that is, the relationship between the refractive index and absorption coefficient of silicon and the change of free carrier concentration in silicon. According to the experimental results of R.A. Soref et al. using the refractive index and optical abs...
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