Mach-Zehnder electro-optic modulator in rectangular structure

An electro-optical modulator and Mach technology, applied in the field of integrated optics, can solve the problems of long scale, large single chip size, unfavorable number of integrated discrete components, etc., and achieve the effects of reduced size, easy expansion and integration, and efficient and compact device structure

Active Publication Date: 2013-08-14
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the optical modulators with the above structure generally have the problem that the size of the single chip occupied is relatively large or the scale in the one-dimensional direction is still long, at least in the order of millimeters, which is not conducive to improving the discreteness of the photonic circuit chip or the on-chip optical interconnection system. The number of components integrated

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  • Mach-Zehnder electro-optic modulator in rectangular structure
  • Mach-Zehnder electro-optic modulator in rectangular structure
  • Mach-Zehnder electro-optic modulator in rectangular structure

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Embodiment Construction

[0017] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments, but the protection scope of the present invention should not be limited thereby.

[0018] A Mach-Zehnder electro-optic modulator with a rectangular structure of the present invention can be fabricated on one of silicon, silicon on insulator (SOI), GeSi / Si, GaAs, GaAs / AlGaAs and InP / InGaAsP semiconductor substrate materials on a base material. As an example of specific implementation, the rectangular Mach-Zehnder electro-optic modulator of the present invention is prepared on SOI material. The electro-optical modulation of silicon materials is based on the free carrier plasma dispersion effect of silicon, that is, the relationship between the refractive index and absorption coefficient of silicon and the change of free carrier concentration in silicon. According to the experimental results of R.A. Soref et al. using the refractive index and optical abs...

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Abstract

The invention relates to a Mach-Zehnder electro-optic modulator in a rectangular structure and belongs to the technical field of integrated optics. An input waveguide and one end of an L-shaped reference arm are mutually perpendicularly intersected to form a T-shaped structure, a light splitting micro nano groove filled with dielectric materials is etched at the intersected position, one end of the input waveguide serves as an optical path input end of the modulator, and the other end of the input waveguide serves as an output end to be connected with one end of an L-shaped phase shift arm. The L-shaped reference arm and the L-shaped phase shift arm respectively form optical paths required for a Mach-Zehnder interference structure, an output waveguide and the L-shaped phase shift arm are mutually perpendicularly intersected to form a T-shaped structure, and a light splitting micro nano groove filled with dielectric materials is etched at the intersected position, one end of the output waveguide serves as an optical path output end of the modulator, and the other end of the output waveguide serves as an input end to be connected with the other end of the L-shaped reference arm. The Mach-Zehnder electro-optic modulator is efficient and compact in structure, and compared with the length of a traditional reference arm or phase shift arm which can merely be in cascade connection in a one-dimensional direction, the Mach-Zehnder electro-optic modulator is expanded and integrated easily towards a two-dimensional direction.

Description

technical field [0001] The invention relates to an optical modulator used in an optical communication system, an optical network technology and an on-chip optical interconnection system, in particular to a Mach-Zehnder electro-optical modulator adopting a rectangular structure, belonging to the technical field of integrated optics. Background technique [0002] The massive growth of information data such as mobile multimedia, interactive Internet TV, and video data streams has put forward higher and faster requirements for the construction of urban broadband optical fiber metropolitan area networks. Optical modulators are used to achieve high-speed transmission in optical interconnection links. key components. The new generation of devices is characterized by their increased performance in the optical domain and the integration of multiple functions. In recent years, with the demand for low-cost and high-performance optical chips, monolithic optical devices based on Photoni...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/025
Inventor 刘克牟思璇
Owner BEIJING UNIV OF TECH
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