A laser probe composition analyzer integrated with macro and micro areas

Abstract

The invention belongs to the technical field of laser precision detection and discloses an integrated laser probe component analyzer for macroscopic and micro-area component analysis. The integrated laser probe component analyzer comprises a laser, a frequency multiplication module, two cage-type cubes, two laser wavelength reflectors, an industrial camera, a spectrum collector, an object lens converter, a focusing object lens, a spectrometer and a computer. A front end of a light outlet of the laser is provided with the frequency multiplication module. The laser is in an electric signal communication relationship with the computer. The integrated laser probe component analyzer can realize accurate qualitative analysis and high-precision quantitative analysis of macroscopic and micro-area components, can realize fast seamless switching of macroscopic and micro-area component analysis, has a modularization design and a compact structure, and improves an equipment integrated level. All the modules have independent functions and can be operated and maintained easily. Through the optical path modularization design, users can conveniently carry out optical path calibration before use so that operation time is saved and an analysis precision is improved.

Description

technical field [0001] The invention belongs to the technical field of laser precision detection, and specifically relates to a macro- and micro-area integrated laser probe composition analyzer, which is mainly used for accurate qualitative analysis and relatively high-precision quantitative analysis of macroscopic and micro-area element components of substances. Background technique [0002] Compositional analysis is a key tool in research and production in engineering and materials science. Laser-Induced Breakdown Spectroscopy (LIBS for short) uses high-energy-density laser pulses to excite the substance to be analyzed to generate plasma, and at the same time analyzes the energy-level transition characteristic spectra of atoms and ions in the plasma to obtain various The method of element type and content. At present, the main problem of laser probe technology is that the interference of other elements and the matrix effect are large, and the detection limit is poor, gene...

AI Technical Summary

Problems solved by technology

First of all, the device can only be applied to the analysis of the micro-area composition of the sample, that is, it can only conduct relatively accurate qualitative and quantitative analysis on the micro-area with a diameter of several microns on the surface of the sample, and cannot satisfy the user's macroscopic qualitative analysis of the sample. Second, if the user needs to analyze the composition of the substance in the macro and micro areas separately, the macro and micro area composition analysis equipment must be used separately

The equipment mentioned in the above patent documents cannot achieve the purpose of macroscopic and micro-area component analysis at the same time, and when macroscopic and micro-area detection is required, using two laser probe equipment for analysis does not meet the requirements of economy and efficiency; finally , the optical components in this device have a high degree of multiplexing. For example, the reflector is used in the laser light path to reflect the laser light, and at the same time it is used in the imaging observation light path, which leads to complex optical system design and is not easy to correct and maintain the optical path system. Increased instrument cost and equipment complexity

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