The present invention relates to a Smart Defect Calibration, Diagnosis, Sampling
System and The Method Thereof for manufacturing fab is provided. The intelligent defect diagnosis method comprises: receiving pluralities of defect data, design
layout data, analyzing the defect data, design layouts, by a Critical Area Analysis (CAA)
system, wherein the analyzing step further contains the sub-steps: superposing the defect contour pattern and the design
layout, performing CAA to identify a killer or non-killer defect based on the open or short
failure probability, defects are classified as high, medium, low, or negligible risk defect based on the Killer Defect Index, defect
signal parameters, selecting defect samples based on the defect classification data, selecting alarm defect and filtering false defect with pattern match with defect pattern
library and frequent failure defect
library, performing coordinate conversion and pattern match between
image contour and design
layout for coordinate correction, creating a CAA accuracy
correction system and
defect size calibration
system by analyzing original
defect size data and defect contour size from
image analysis, evaluating the
defect size using
measurement uncertainty analysis with
statistical analysis methods to reach the purposes of increasing CAA accuracy and Killer Defect
identification rate.