Test specimen fixture for ultrasonic vibration assisted grinding/polishing

Abstract

The invention relates to a test specimen fixture for ultrasonic vibration assisted grinding/polishing, and belongs to the field of precision machining and ultra-precision machining. The test specimen fixture comprises an ultrasonic generator, a piezoelectric ceramic transducer, a conical amplitude-change pole, a workpiece clamping system and a trimming ring. Alternating current is converted into ultrasonic-frequency electric oscillation signals by the ultrasonic generator, and the ultrasonic-frequency electric oscillation signals are transmitted to the piezoelectric ceramic transducer by a collector ring. The ultrasonic-frequency electric oscillation signals are converted into ultrasonic-frequency mechanical vibration by the piezoelectric ceramic transducer. The small amplitude of the vibration outputted by the transducer is magnified by the conical amplitude-change pole, and the vibration with the magnified amplitude is transmitted to the workpiece clamping system, so that workpieces can ultrasonically vibrate in ultra-precision grinding/polishing procedures. The test specimen fixture has the advantages that the test specimen fixture is compact in structure, simple in operation and high in efficiency and applicability; the machining precision and the surface quality of each workpiece can be obviously improved; grinding/polishing conditions further can be improved, for example, cutting force and cutting heat can be reduced, and vibration can be eliminated or suppressed; the durability of a grinding disc and the durability of polishing cloth can be improved, and the like.

Description

technical field [0001] The invention relates to the field of precision and ultra-precision machining, in particular to a sample fixture for ultrasonic vibration assisted grinding / polishing. It can be used in the processing and manufacturing of optical parts, microelectronic chips and semiconductor devices and other products. Background technique [0002] With the development of science and technology, people's demand and requirements for product performance are more stringent, not only in terms of quality, but also in terms of efficiency, especially in the fields of defense industry, microelectronics technology, aerospace, precision instruments and meters. The precision and quality requirements of devices are getting higher and higher. Especially with the rapid development of computer technology, IC technology, and optical technology in recent years, the demand for optical components, semiconductor devices, and electronic circuit chips is increasing, and the requirement...

AI Technical Summary

Problems solved by technology

Previous ultrasonic vibration-assisted grinding / polishing specimen fixtures often have disadvantages such as single structure, complicated workpiece clamping, non-rotatable, small number of clamps, limited workpiece shape and size, and low processing efficiency.

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