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Specimen sample holder for ultrasonic vibration assisted grinding/polishing

A kind of test piece sample, ultrasonic technology, applied in the direction of grinding workpiece support, etc., can solve the problems of limited shape and size of the workpiece, complicated workpiece clamping, and small number of clamping, etc., to achieve compact structure, large number of clamping, clamping Effects of various structures

Active Publication Date: 2015-10-21
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Previous ultrasonic vibration-assisted grinding / polishing specimen fixtures often have disadvantages such as single structure, complicated workpiece clamping, non-rotatable, small number of clamps, limited workpiece shape and size, and low processing efficiency.

Method used

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  • Specimen sample holder for ultrasonic vibration assisted grinding/polishing
  • Specimen sample holder for ultrasonic vibration assisted grinding/polishing
  • Specimen sample holder for ultrasonic vibration assisted grinding/polishing

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Embodiment Construction

[0016] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

[0017] see Figure 1 to Figure 3 Shown, the test piece sample holder of the ultrasonic vibration assisted grinding / polishing involved in the present invention is designed according to the BNi62 type ultra-precision grinding / polishing machine, and the overall size of the main part of the holder is 210mm×210mm×170mm, and the size of the holder is based on a diameter of 500mm grinding disc / polishing disc is designed, the size of the fixture can be adjusted according to the diameter of the grinding disc / polishing disc, but it must be ensured that the diameter of the dressing ring is greater than the contact length with the grinding disc, so as to ensure that the dressing ring can hold the entire The grinding disc is trimmed to ensure the flatness of the grinding disc. The clamp can be easily installed on the polishin...

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Abstract

The invention relates to a test specimen fixture for ultrasonic vibration assisted grinding / polishing, and belongs to the field of precision machining and ultra-precision machining. The test specimen fixture comprises an ultrasonic generator, a piezoelectric ceramic transducer, a conical amplitude-change pole, a workpiece clamping system and a trimming ring. Alternating current is converted into ultrasonic-frequency electric oscillation signals by the ultrasonic generator, and the ultrasonic-frequency electric oscillation signals are transmitted to the piezoelectric ceramic transducer by a collector ring. The ultrasonic-frequency electric oscillation signals are converted into ultrasonic-frequency mechanical vibration by the piezoelectric ceramic transducer. The small amplitude of the vibration outputted by the transducer is magnified by the conical amplitude-change pole, and the vibration with the magnified amplitude is transmitted to the workpiece clamping system, so that workpieces can ultrasonically vibrate in ultra-precision grinding / polishing procedures. The test specimen fixture has the advantages that the test specimen fixture is compact in structure, simple in operation and high in efficiency and applicability; the machining precision and the surface quality of each workpiece can be obviously improved; grinding / polishing conditions further can be improved, for example, cutting force and cutting heat can be reduced, and vibration can be eliminated or suppressed; the durability of a grinding disc and the durability of polishing cloth can be improved, and the like.

Description

technical field [0001] The invention relates to the field of precision and ultra-precision machining, in particular to a sample fixture for ultrasonic vibration assisted grinding / polishing. It can be used in the processing and manufacturing of optical parts, microelectronic chips and semiconductor devices and other products. Background technique [0002] With the development of science and technology, people's demand and requirements for product performance are more stringent, not only in terms of quality, but also in terms of efficiency, especially in the fields of defense industry, microelectronics technology, aerospace, precision instruments and meters. The precision and quality requirements of devices are getting higher and higher. Especially with the rapid development of computer technology, IC technology, and optical technology in recent years, the demand for optical components, semiconductor devices, and electronic circuit chips is increasing, and the requirement...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B41/06B24B1/04
Inventor 赵宏伟崔涛韩磊李烁张文爽李建平史成利刘闯田野曲涵
Owner JILIN UNIV
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