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V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence

A detonation sequence and actuator technology, applied in the field of fuze, can solve the problems of difficult integration and large volume of traditional fuze, and achieve the effect of improving adaptability, high degree of intelligence, and realizing large-scale manufacturing

Inactive Publication Date: 2013-09-11
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Traditional fuzes have disadvantages such as large size and difficulty in integration

Method used

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  • V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence
  • V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence
  • V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the accompanying drawings.

[0019] refer to figure 1 , a MEMS actuator with a V-shaped structure for detonation sequence, including a single crystal silicon substrate 1, and an accelerating bore 5 with a diameter of 150-180um is fabricated on the single crystal silicon substrate 1, and the accelerating bore 5 is made of a flyer material In the channel, the silicon dioxide insulating layer 2 is grown on the single crystal silicon substrate 1 with a growth thickness of 2-3um, and the single crystal silicon structure layer 3 is bonded to the single crystal silicon substrate 1 on which the silicon dioxide insulating layer 2 is grown. , the thickness of the monocrystalline silicon structural layer 3 is 50-100 um, and the metal electrode layer 4 is deposited on the anchor point 3-2 of the monocrystalline silicon structural layer 3 .

[0020] refer to figure 2 , the MEMS actuator is fabricated in the...

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Abstract

A V-shaped-structure MEMS (micro-electromechanical system) actuator for a detonating sequence comprises a monocrystalline silicon substrate and anchor points. A monocrystalline silicon structure layer is bonded with the monocrystalline silicon substrate with a silicon dioxide insulating layer grown thereon, a metal electrode layer is deposited on the monocrystalline silicon structure layer, the MEMS actuator is manufactured in the monocrystalline silicon structure layer, two ends of a V-shaped beam thermoelectric driving unit of an array structure are connected with the anchor points, a middle arm is positioned in the middle of and mutually fixed with the V-shaped beam thermoelectric driving unit, two ends of a flexible beam are connected with the middle arm and the head end of a lever, and a partition is processed at the tail end of the lever to cover an acceleration bored hole. Thermoelectric effect and thermal expansion effect of silicon materials are utilized, and the V-shaped-structure MEMS actuator for detonating the sequence has the advantages of low cost, high intelligence and easiness in integration.

Description

technical field [0001] The invention relates to the technical field of fuzes, in particular to a V-shaped structure MEMS actuator for detonation sequences. Background technique [0002] The fuze is a control device (system) that uses target and environmental information to detonate or ignite the charge of the ammunition warhead under predetermined conditions. It is usually installed on rockets, missile warheads, and gun / tank / mortar ammunition, etc., according to the type of ammunition Different fuzes are selected according to different targets and the needs of dealing with targets. The fuze is an important part of the weapon system. It detects the environment and targets to obtain information, process and identify information, and realizes the safety state control and optimal detonation control of the fuze. The basic functions of the fuze are "safety" and "reliable detonation of the warhead". The safety device in the fuze is an important part of the fuze system. One of its...

Claims

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Application Information

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IPC IPC(8): B81B7/02B81C1/00
Inventor 赵玉龙胡腾江李波白颖伟
Owner XI AN JIAOTONG UNIV
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