One-chip type integrated optical gyroscope and manufacturing method thereof

Abstract

The invention discloses a one-chip type integrated optical gyroscope and a manufacturing method thereof. The one-chip type integrated optical gyroscope comprises a light source, a Bragg grating, a Y waveguide, an annular resonant cavity, a light detector and an integrated circuit, wherein laser output by the light source is changed into narrow-line wide laser through the Bragg grating and then is divided into two beams of light by the Y waveguide to enter the annular resonant cavity; the light detector detects clockwise light strength and anticlockwise light strength of the annular resonant cavity to carry out photovoltaic conversion; and the integrated circuit is used for driving, feeding back and controlling the light source, directly modulating the light source, processing a signal output by the light detector and outputting a gyroscope signal. The method disclosed by the invention realizes the one-chip type integrated optical gyroscope based on a mixed integration technology, a light source modulation technology and bonding. According to the one-chip type integrated optical gyroscope and the manufacturing method thereof disclosed by the invention, a scheme of modulating and demodulating signals directly modulated by the light source is adopted so that key parts of the integrated optical gyroscope are possibly mixed and integrated on the same silicon base; and therefore, the size of the gyroscope is reduced and the integration degree is improved.

Description

technical field [0001] The invention relates to the technical field of optical gyroscopes, in particular to a monolithic integrated optical gyroscope and a manufacturing method thereof. Background technique [0002] With its advantages of miniaturization, integration and light weight, integrated optical gyroscope has become a research hotspot in the field of gyroscope. The working principle of the resonant integrated optical gyroscope is: the optical Sagnac effect (Sagnac Effect) will cause the resonant cavity to have different resonant frequencies in the clockwise and counterclockwise directions, and the resonant frequency difference is proportional to the angular velocity of the gyroscope. By detecting this resonance The angular velocity of the gyroscope can be known by the frequency difference. The current integrated optical gyroscope is still in the development stage of a discrete prototype, which has a large volume and a low degree of integration. The factors that res...

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Problems solved by technology

[0003] Aiming at the problems existing in the integration of existing optical gyroscopes, the present invention provides a monolithic integrated optical gyroscope and a manufacturing method thereof, and realizes monolithic integrated optical gyroscopes based on hybrid integration technology and light source modulation technology

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