Slit optical waveguide epitaxial grating fp cavity cascaded optical biochemical sensor chip

Abstract

The invention provides a slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip. The sensor chip comprises an SOI (silicon-on-insulator) matrix formed by bonding a silicon-based layer, a silicon dioxide layer and a monocrystalline silicon layer from bottom to top in sequence in a stacked manner, and is characterized in that the monocrystalline silicon layer of the SOI matrix comprises two epitaxial grating FP cavities optically connected in a coupling manner; and epitaxial gratings of the epitaxial grating FP cavities are formed outside the SOI matrix and are convex tooth-shaped gratings. The sensor chip has the beneficial effects that the slit optical waveguide structure is introduced into the scheme, and the slit waveguide can farthest limit light in slit areas to enhance the interaction between light and matters; the sensor chip has the advantages that the density of the optical energy in the slit space is far more than the density of the optical energy in the evanescent field, and the light-matter interaction is stronger, so that the detection sensitivity is higher; and under the condition of achieving the same sensing properties, the sensor chip can be favorable for achieving the miniaturization and on-chip sensing system of an optical biochemical sensor.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of optical sensing technology, in particular to a biochemical sensor chip based on a vernier effect optical resonant cavity. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, although fluorescent-labeled optical ...

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Problems solved by technology

[0006] The purpose of the present invention is to solve the detection problem of some biochemical substances, on the basis of the mainstream biochemical sensor based on optical detection in the prior art, in order to further solve the existing problems of using evanescent wave detection principle and single system detection The low energy density of the evanescent wave leads to the difficulty of detection and the narrow measurement range and low sensitivity of a single system. A FP cavity cascaded optical biochemical sensor chip based on the slit optical waveguide epitaxial grating based on the vernier effect is proposed.

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