Vernier effect based dual-micro-ring resonator optical biochemical sensing chip

Abstract

The invention provides a vernier effect based dual-micro-ring resonator optical biochemical sensing chip. The chip comprises an SOI (silicon on insulator) substrate consisting of a silicon base layer, a silicon dioxide layer and a mono-crystal layer which are overlapped and bonded from the bottom to the top sequentially; the mono-crystal silicon layer of the SOI substrate comprises two micro-ring resonators which are in optical coupling connection; and the micro-ring resonators are in overlapped shape in the space structure. Because the slit optical waveguide structure is introduced into the scheme and the slit waveguide can be used for limiting light as much as possible in a slit area to intensify the interaction between the light and a substance; the advantages that the light energy density in the slit space is far higher than that in an evanescent field, the interaction between the light and the substance can be stronger, and the detection sensitivity can be higher are achieved. The optical biochemical sensing chip is advantageous to implementation of miniaturization and SOI sensing system of the optical biochemical sensor under the condition of the same sensing performance.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of optical sensing technology, in particular to a biochemical sensor chip based on a vernier effect optical resonant cavity. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, although fluorescent-labeled optical ...

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Problems solved by technology

[0006] The purpose of the present invention is to solve the detection problem of some biochemical substances, on the basis of the mainstream optical biochemical sensor based on optical detection in the prior art, in order to further solve the problem of using evanescent wave detection principle and single system detection The low energy density of the evanescent wave leads to the difficulty of detection and the narrow measurement range and low sensitivity of a single system. A biochemical sensor chip based on the vernier effect optical resonant cavity is proposed.

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