Large-caliber aspheric surface primary mirror detection device and method

Abstract

The invention relates to a large-caliber aspheric surface primary mirror detection device and method. The device includes a point light source, a baffle, a measuring scale, a CCD (charge coupled detector) and a thin wire. According to the method, a spherical wave emitted by the point light source passes through an annular seam in the baffle and irradiates the mirror surface of a to-be-detected aspheric surface primary mirror; then the spherical wave is reflected by the mirror surface; the position of the baffle is adjusted, so that the light reflected by the mirror surface of the to-be-detected aspheric surface primary mirror can pass through the annular seam in the baffle; a circle of bright ray is formed at the point light source; the thin wire is used for cutting at the point light source; observing from the back of the thin wire, a user can see that the bright ray disappears; the CCD positioned behind the point light source is used for shooting and recording images of the bright ray; the radius of the annulus of the bright ray and the distance from the light point source to the to-be-detected aspheric surface primary mirror are measured. The position of the point light source or the baffle is adjusted, and the radius of the annulus of the bright ray and the distance from the light point source to the to-be-detected aspheric surface primary mirror are measured, so that the radius of curvature of a vertex of the to-be-detected aspheric surface primary mirror, a secondary constant and a surface shape are figured out according to the aspheric surface primary mirror surface shape formula.

Description

Technical field [0001] The invention belongs to the field of advanced optical manufacturing and detection, and relates to an optical detection device, in particular to a large-aperture aspheric primary mirror detection system. Background technique [0002] The main difficulty in the application of aspheric surfaces lies in the processing and testing of aspheric surfaces, especially in the inspection process. Since spherical surfaces have a common center of curvature, aspheric surfaces do not, which brings difficulties to the processing of aspheric surfaces. Although a variety of aspheric detection technologies have been developed at present, there is still no effective measurement method for certain forms of aspheric surfaces. The apex radius of curvature and the quadratic constant are two important characteristic parameters of aspheric surfaces. Its accurate measurement and control are very important to ensure the reliability of the zero inspection of the large-diameter aspheric...

AI Technical Summary

Problems solved by technology

[0017] The invention provides a method for measuring the radius of curvature and the quadratic constant of the vertex of the quadratic aspheric primary mirror. The method skillfully utilizes the baffle plate with the annular slit, which can effectively solve the problem that each distance in the device is difficult to be accurately measured. problems, and the structure is simple and the inspection cost is low

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