Micro-machinery cantilever capacitance type power sensor-based phase detector and manufacturing method of phase detector
A technology of power sensor and phase detector, which is applied to the phase angle between voltage and current, electric solid devices, and the technology used to produce decorative surface effects, etc., which can solve the problems of low integration, large DC loss, and large space occupation and other issues to achieve the effect of easy integration, low power consumption and high sensitivity
Inactive Publication Date: 2013-10-23
SOUTHEAST UNIV
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[0003] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides a phase detector based on a micromechanical cantilever beam capacitive power sensor and a preparation method, which solves the problem that the traditional phase detector takes up a large space and has low integration. The problem of large DC loss
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[0039] The present invention will be further described below in conjunction with the accompanying drawings.
[0040] Such as figure 1 , 2 Shown in and 3: the phase detector based on the micromachined cantilever beam capacitive power sensor includes a gallium arsenide substrate 1, a ground wire, a CPW signal line, a power combiner and a MEMS cantilever beam arranged on the gallium arsenide substrate 1 A capacitive power sensor, and an external capacitive three-point voltage-controlled oscillator and a frequency meter define a symmetrical axis on the gallium arsenide substrate 1;
[0041] The ground wires include an upper side ground wire 21, a lower side ground wire 22 and a common ground wire 23, and the upper side ground wire 21 and the lower side ground wire 22 are respectively arranged on the upper side and the lower side of the axis of symmetry. side, the common ground wire 23 is located on the weighing axis, the upper side ground wire 21 is connected to the common groun...
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Abstract
The invention discloses a micro-machinery cantilever capacitance type power sensor-based phase detector and a manufacturing method of the phase detector. A first CPW signal line and a second CPW signal line are respectively used as the input ends of a reference signal and a feedback signal, and are connected to a third CPW signal line by a two-in-one power combining device; an MEMS (micro electro mechanical system) cantilever above the third CPW signal line and a sensing electrode form an MEMS cantilever capacitance type power sensor between an anchoring area of the MEMS cantilever and a press welding block of the sensing electrode; variable capacitors in the MEMS cantilever capacitance type power sensor are used for forming a capacitance three-point type voltage-controlled oscillator; and the output signal of the capacitance three-point type voltage-controlled oscillator is connected to the input end of a frequency meter, thus forming a position detector loop. The micro-machinery cantilever capacitance type power sensor-based phase detector has the advantages of novel structure, low power consumption, high sensitivity and easy integration.
Description
technical field [0001] The invention relates to a phase detector based on a micromechanical cantilever beam capacitive power sensor and a preparation method, belonging to the technical field of microelectromechanical systems (MEMS). Background technique [0002] Phase detectors can be used to measure the phase difference between two signals. Phase detectors are of great significance and widely used in signal transformation, information acquisition, control, microwave positioning, antenna pattern measurement and near-field diagnosis. There are many methods to realize microwave phase detection: vector method, phase detection method based on diode structure, multiplier method using FET, sampling mixing method, etc., and a test system composed of computers. In recent years, with the continuous deepening of the research on the MEMS cantilever beam capacitive power sensor, the phase detector based on the micromachined cantilever beam capacitive power sensor has become possible. ...
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IPC IPC(8): G01R25/00B81B7/00B81C1/00
Inventor 廖小平王文岩
Owner SOUTHEAST UNIV