Surface plasmon coupling terahertz quantum well detector

A technology of surface plasmons and quantum wells, which is applied in photometry, electrical components, and semiconductor devices using electric radiation detectors, can solve the problems of low responsivity and operating temperature, improve absorption efficiency, and improve device Effect of Responsivity and Operating Temperature
CN103367518AInactive Publication Date: 2013-10-23SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2013-10-23
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a surface plasmon coupling terahertz quantum well detector, which comprises a semiconductor substrate, a lower electrode, a multi-quantum well structure, an upper electrode and a metal grating, wherein the metal grating is used for realizing polarity deflection of incident photons. The incident photons can be enabled to be interacted with electrons in the upper electrode through adjusting the period of the metal grating, the width of a metal strip, and the electron doping density and the thickness of the upper electrode so as to from surface plasmons on the surface of the upper electrode. The device is located in a sub-wavelength range at a terahertz frequency band because the thickness is only 2-5mum. Therefore, evanescent waves corresponding to the surface plasmons can improve the sub-band absorption efficiency of the device at the resonant frequency, and improves the response rate and the working temperature of the device.
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Description

technical field

[0001] The invention belongs to the field of semiconductors, in particular to a surface plasmon coupled terahertz quantum well detector. Background technique

[0002] Quantum well detector is an important detector working in the mid-to-far infrared and terahertz frequency bands. Terahertz quantum well detector is a photon-type detector with important application prospects in the terahertz frequency band, which has the characteristics of high sensitivity, fast detection speed and narrow-band response. The main structure of this detector includes upper contact layer, multi-quantum well layer and lower contact layer. The number of quantum wells is between 10 and 100, and the thickness of the device is between 2.0 and 5.0 μm in the growth direction of the quantum wells. The bound electrons are introduced into the quantum well by doping. Due to the parabolic energy dispersion relationship, these bound electrons can only absorb photons with an electric field comp...

Claims

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