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Self-imageable film-forming polymers, compositions thereof, and devices and structures made therefrom

A technology of polymers and compositions, applied in the field of polymers

Inactive Publication Date: 2016-08-10
SUMITOMO BAKELITE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, PHS photoresists are known to have limited thermal stability and limited resistance to conventional dry etch processability

Method used

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  • Self-imageable film-forming polymers, compositions thereof, and devices and structures made therefrom
  • Self-imageable film-forming polymers, compositions thereof, and devices and structures made therefrom
  • Self-imageable film-forming polymers, compositions thereof, and devices and structures made therefrom

Examples

Experimental program
Comparison scheme
Effect test

Embodiment A1

[0092] Synthesis of Example A1.NBPhOAc

[0093]

[0094] Into an appropriately sized and equipped reaction vessel were charged 1750 g of dicyclopentadiene, 2147 g of p-acetoxystyrene and 64 g of phenothiazine. Stirring was started, then the reactor was purged of air and pressurized to 5 psig with nitrogen. Begin heating to 160°C and keep the reactor at 160°C for 6 hours. The reactor was then cooled to ambient temperature, the reaction mixture was removed from the reactor and distilled (110-120 mtorr, crucible temperature 113-114° C.) to obtain 1227 g of 99% pure (GC) NBPhOAc.

Embodiment A2

[0095] The synthesis of embodiment A2.NBMMPA

[0096]

[0097] Into an appropriately sized and equipped reaction vessel were charged 900 g (6.8 mol) of dicyclopentadiene and 11.2 kg (-98% pure, 54.5 mol) of syringyl acetate. Stirring was then started and flushed with nitrogen three times while stirring. The reaction was brought to 200°C over a 3 hr period while allowing the pressure to rise to 23 psig. Once at temperature, the reaction mixture was stirred at 200°C for 6 hours during which time the pressure ranged from 12-23 psi. The reaction was then allowed to cool to room temperature overnight. GC analysis showed the product mixture contained 72.6% syringyl acetate, 0.1% DCPD, 25.8% NBMMPA and 0.2% 4-NBCH 2 C 6 h 3 -2-OMe,4-OH. The total weight recovered from the reactor was about 12Kg.

[0098] The recovered material was distilled under high vacuum via a 6-inch column and distillation apparatus to remove most of the excess syringyl acetate. After removing 580.3 g...

Embodiment A3

[0100] The synthesis of embodiment A3.NBPhOH

[0101]

[0102] 100 g of NBPhOAc and 150 g of THF were charged to an appropriately sized and equipped reaction vessel and the reaction mixture was heated to 60°C with stirring under a nitrogen blanket pressurized to 5 psig. Then 263 g of a 20% aqueous sodium hydroxide solution were added dropwise over the course of 1 hour and the reaction mixture was stirred at temperature for a further 4 hours before the solution was acidified by the dropwise addition of 131 g of acetic acid. The mixture was then allowed to cool, transferred to a separatory funnel, diluted with 200 mL of ethyl acetate, and washed 5 times with 200 mL of water. The solvent was then removed by rotary evaporation. The resulting crystals were washed with 100 g of hexane and then recrystallized from 400 mL of a 1:1 toluene:hexane solution. Yield was 44.8 g (55.1%) NBPhOAc.

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PUM

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Abstract

Polymers and self-imageable film-forming compositions comprising such polymers comprising norbornene-type repeating units having at least one phenolic functional group and maleic anhydride-type repeating units, which can be formulated for positive tone imaging or negative-tone imaging. The films thus formed are useful as self-imageable layers in the manufacture of microelectronic devices, such as semiconductors, and optoelectronic devices.

Description

[0001] Cross References to Related Applications [0002] This application is entitled to and claims U.S. Provisional Application Serial No. 61 / 416950, filed November 24, 2010, and entitled "Self-Imageable Film-Forming Polymers, Compositions Thereof, and Devices and Structures Made Therefrom" Patent priority. This provisional patent is incorporated herein by reference in its entirety. technical field [0003] The present disclosure relates generally to polymers comprising both norbornene-type repeat units and non-norbornene-type repeat units useful in polymer compositions intended to form self-imageable films, and more particularly to such polymers : That is, the polymer comprises norbornene-type repeating units having side groups containing phenolic functional groups and maleic anhydride-type repeating units. Such polymers are useful in polymer compositions that can provide films that are self-imageable when image-wise exposed to actinic radiation. Background technique ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C08F222/06C08F220/52C08F210/14G03F7/038
CPCC08F222/06C08F232/08G03F7/0233G03F7/0382G03F7/0395C08F210/14C08F220/52G03F7/038
Inventor 大治阳雄池田L·F·罗德斯P·坎达纳拉彻驰
Owner SUMITOMO BAKELITE CO LTD