Nano-zinc-oxide temperature sensor and manufacturing process thereof

A nano-zinc oxide and temperature sensor technology, applied in the field of nano-materials, can solve problems such as low precision, high cost, and wide measurement range, and achieve the effects of wide temperature measurement range, low cost, and easy operation and use

Inactive Publication Date: 2013-12-11
ZHEJIANG GONGSHANG UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a nano zinc oxide temperature sensor in order to overcome the problem of contradiction between the accuracy and cost of the existing temperature sensor, that is, the problem of high cost or low precision. Under the premise of guarantee, the cost is low and the measurement range is wide

Method used

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  • Nano-zinc-oxide temperature sensor and manufacturing process thereof
  • Nano-zinc-oxide temperature sensor and manufacturing process thereof
  • Nano-zinc-oxide temperature sensor and manufacturing process thereof

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Effect test

Embodiment 1

[0033] The preparation technology of nano-zinc oxide temperature sensor specifically comprises the following steps:

[0034] 1) Preparation of nano-zinc oxide: first, Na 2 CO 3 and Zn(NO 3 ) 2 solution, under constant stirring, Zn(NO 3 ) 2 The solution was dropped into Na 2 CO 3 The reaction is carried out in the solution, and then, the precipitate is separated and dried, and calcined at 400° C. for 36 minutes to obtain nano-zinc oxide, such as figure 2 shown;

[0035] 2) Preparation of porous anodized aluminum template: take a high-purity aluminum plate with a thickness of 5 mm, first clean it ultrasonically in a mixed solution of acetone and ethanol with a volume ratio of 1:1, and then clean it in a solution of ethanol with a volume ratio of 4:1. Polished in a mixed solution of perchloric acid (Ra ≤ 0.01μm) for 5 minutes; then, washed with deionized water and placed in a 0.3mol / L oxalic acid solution, anodized at a DC voltage of 40V for 0.5h, on a high-purity aluminu...

Embodiment 2

[0039] The preparation technology of nano-zinc oxide temperature sensor specifically comprises the following steps:

[0040] 1) Preparation of nano-zinc oxide: first, Na 2 CO 3 and Zn(NO 3 ) 2 solution, under constant stirring, Zn(NO 3 ) 2 The solution was dropped into Na 2 CO 3 The reaction is carried out in the solution, and then, the precipitate is separated and dried, and calcined at 450° C. for 60 minutes to obtain nano-zinc oxide, such as figure 2 shown;

[0041] 2) Preparation of porous anodized aluminum template: Take a high-purity aluminum plate with a thickness of 1 mm, first clean it ultrasonically in a mixed solution of acetone and ethanol with a volume ratio of 1.5:1 for 30 minutes, and then clean it with ethanol with a volume ratio of 2:1 Polished in a mixed solution of perchloric acid (Ra ≤ 0.01μm) for 10 minutes; then, washed with deionized water and placed in a 0.35mol / L oxalic acid solution, anodized at a DC voltage of 25V for 0.7h, on a high-purity a...

Embodiment 3

[0045] The preparation technology of nano-zinc oxide temperature sensor specifically comprises the following steps:

[0046] 1) Preparation of nano-zinc oxide: first, Na 2 CO 3 and Zn(NO 3 ) 2 solution, under constant stirring, Zn(NO 3 ) 2 The solution was dropped into Na 2 CO 3 The reaction is carried out in the solution, and then, the precipitate is separated and dried, and calcined at 500°C for 30 minutes to obtain nano-zinc oxide, such as figure 2 shown;

[0047] 2) Preparation of porous anodized aluminum template: take a high-purity aluminum plate with a thickness of 3 mm, first clean it ultrasonically in a mixture of acetone and ethanol with a volume ratio of 2:1 for 15 minutes, and then clean it with ethanol with a volume ratio of 3:1 Polished in a mixed solution of perchloric acid (Ra ≤ 0.01μm) for 15 minutes; then, washed with deionized water and placed in a 0.25mol / L oxalic acid solution, anodized at a DC voltage of 30V for 1 hour, on the surface of a high-pu...

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Abstract

The invention relates to the technical field of nano materials and specifically relates to a nano-zinc-oxide temperature sensor and a manufacturing process thereof. The nano-zinc-oxide temperature sensor includes a high-purity aluminum plate, the surface of which is coated with an anodic aluminum oxide thin film. An interdigital electrode is magnetron sputtered on the anodic aluminum oxide thin film. The interdigital electrode is coated with a nano-zinc-oxide layer. The manufacturing process of the nano-zinc-oxide temperature sensor is that: firstly preparing a nano-zinc oxide, then forming the thin film through anodic oxidation on the high-purity aluminum plate, then magnetron sputtering the interdigital electrode on the anodic aluminum oxide thin film and finally depositing the nano-zinc oxide on the interdigital electrode so that the nano-zinc-oxide temperature sensor is obtained. The nano-zinc-oxide temperature sensor is relatively high in temperature sensitivity, not only low in cost but also wide in temperature measurement scope, simple in manufacturing process and simple and convenient to operate.

Description

technical field [0001] The invention relates to the technical field of nanometer materials, in particular to a nanometer zinc oxide temperature sensor and a preparation process thereof. Background technique [0002] Temperature sensors are roughly divided into platinum resistors, copper resistors, thermocouples, NTC thermistors, PN junctions, infrared rays, etc. according to the preparation materials. Among them, the accuracy of platinum resistance is the best (NTC also has high accuracy after special calibration), which can reach an error of plus or minus 0.2 degrees; the accuracy of thermocouples is relatively poor, but it can measure high temperatures up to 1700 degrees; PN junction accuracy The lowest, but it is easy to integrate in the circuit chip; the linearity of copper resistance is better, but it can only measure the range of relatively low temperature. In practical applications, different temperature sensors need to be selected according to specific situations. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/16B82Y15/00B82Y40/00C23C28/00C23C14/35C23C24/00C25D11/04
Inventor 惠国华
Owner ZHEJIANG GONGSHANG UNIVERSITY
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