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Ion chromatographic method for simultaneously measuring trace amount of anions in high-purity phosphoric acid

A technology of high-purity phosphoric acid and ion chromatography, applied in the field of ion chromatography to determine trace anions in high-purity phosphoric acid, to meet the detection requirements, fast analysis and high accuracy

Active Publication Date: 2015-03-11
ANHUI WAYEE SCI & TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the problem of determining the content of trace anions in high-purity phosphoric acid, so aiming at the determination of trace anions in high-purity phosphoric acid, the present invention proposes a method for measuring trace anions in high-purity phosphoric acid

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  • Ion chromatographic method for simultaneously measuring trace amount of anions in high-purity phosphoric acid
  • Ion chromatographic method for simultaneously measuring trace amount of anions in high-purity phosphoric acid
  • Ion chromatographic method for simultaneously measuring trace amount of anions in high-purity phosphoric acid

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Experimental program
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Effect test

Embodiment 1

[0032] Embodiment 1: Optimization of chromatographic conditions

[0033] Due to the high concentration of phosphate in high-purity phosphoric acid, when using conventional single sodium carbonate eluent, the chromatographic peak of phosphate is between nitrate and sulfate, which interferes with the qualitative determination of trace nitrate and sulfate. Thus affecting the accuracy of quantitative results. According to the characteristics of three valence states of phosphate radicals, it is possible to increase the pH value of leaching so that the phosphate radicals are mainly converted into trivalent PO 4 3- exists in the form such that PO 4 3- The retention time will be extended, in all the ion F to be detected - , Cl - , NO 3 - and SO 4 2-The chromatographic peaks behind the peak, so as not to affect the F - , Cl - , NO 3 - and SO 4 2- qualitative and quantitative. It is found through experiments that when the concentration of sodium hydroxide in the eluent...

Embodiment 2

[0034] Example 2: F - , Cl - , NO 3 - and SO 4 2- Analysis of Mixed Standard Solutions

[0035] (1) Repeatability

[0036] The standard mixed solution of the same concentration was injected continuously for 6 times to obtain F - , Cl - , NO 3 - and SO 4 2 The relative standard deviations of the peak areas were 1.87%, 2.06%, 1.60% and 1.65%, respectively.

[0037] (2) Linear relationship

[0038] For formulated F - , Cl - , NO 3 - and SO 4 2- The linear solution of , according to the injection sequence from low concentration to high concentration, the injection analysis is carried out, and the F at different concentrations is obtained - , Cl - , NO 3 - and SO 4 2- The peak area of ​​the peak area, respectively with the concentration of the ion to be measured (mg / L) as the abscissa, with its peak area as the ordinate plotting, to obtain F - , Cl - , NO 3 - and SO 4 2- working curve, respectively attached figure 2 , image 3 , Figure 4 and ...

Embodiment 3

[0039] Embodiment 3: the pretreatment of high-purity phosphoric acid sample

[0040] (1) Selection of pH value of sample solution

[0041] Add 8, 10, and 12 mL of 12g / L NaOH solution to 0.1 g of phosphoric acid sample respectively, and after distilling to 100 mL with secondary deionized water, measure the pH values ​​of 5.1, 7.5, and 11 respectively, and test the three Sample solutions with different pH values ​​were injected and analyzed. It was found that the retention time of the ion to be measured in the sample solution with a pH value of 5.8 was delayed by 2 minutes compared with the retention time of the ion to be measured in the standard solution, and that in the sample solution with a pH value of 11 The retention time of ions is 1.5min earlier than the retention time of chloride ion and sulfate group in the standard solution, and the retention time of chloride ion and sulfate group in the sample solution with a pH value of 7.5 is very close to the retention time of chl...

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Abstract

The invention discloses an ion chromatographic method for simultaneously measuring a trace amount of anions including F<-1>, Cl<-1>, NO<-3> and SO4<-2>in high-purity phosphoric acid. The sample treatment process is simple and easy to operate, and meanwhile, the whole analysis process is finished within 20min. The method disclosed by the invention can be used for meeting the requirement of enterprises for process control in the process of high-purity phosphoric acid production and has strong practicability for the production and quality control.

Description

technical field [0001] The invention belongs to the field of analytical chemistry and relates to a method for quantitatively measuring the contents of fluoride ions, chloride ions, nitrate and sulfate ions in high-purity phosphoric acid, in particular to an ion chromatography method for measuring trace anions in high-purity phosphoric acid. Background technique [0002] High-purity phosphoric acid is widely used in microelectronics industries such as large-scale integrated circuits and thin-film liquid crystal displays. It is mainly used for wet cleaning and wet etching of chips in the microelectronics industry. , electrical performance and reliability have a great impact. Due to the confusion of the classification of high-purity phosphoric acid at home and abroad, electronic-grade phosphoric acid in foreign countries such as the United States, Japan, and Germany has been industrially produced, but due to technical confidentiality, the quality indicators and producti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/02
Inventor 盖学武焦霞
Owner ANHUI WAYEE SCI & TECH CO LTD