Laser marking equipment for silicon-based thin-film solar cell

Abstract

The invention relates to laser marking equipment for a silicon-based thin-film solar cell, and belongs to the technical field of solar cell equipment. The laser marking equipment solves the technical problem that according to existing laser marking equipment, low cost and complicated graphs cannot be achieved simultaneously. The laser marking equipment comprises an optical system and a substrate work table, wherein the optical system and the substrate work table are installed on a support. The optical system mainly comprises laser devices, beam expanders and focus lenses, wherein the output end of each laser device is provided with one beam expander. The optical system further comprises beam splitters and galvanometers, wherein the beam splitters and the galvanometers are sequentially installed between the corresponding beam expanders and the corresponding focus lenses, laser emitted by the laser devices enters the beam splitters through the beam expanders to be divided into reflective light and refracted light, the reflective light and the refracted light enter the corresponding galvanometer and the corresponding focus lens respectively to form parallel laser beams, and a film layer is marked. According to the laser marking equipment, a large-size cell with complicated graphs can be marked, the use quantity of the laser devices can be reduced, equipment cost is effectively reduced, and production efficiency is improved.

Description

technical field [0001] The invention relates to a silicon-based thin-film solar battery laser scribing equipment, which belongs to the technical field of solar battery equipment. Background technique [0002] Laser scribing equipment is an indispensable key equipment in the manufacture of silicon-based thin film solar cells. It is used to form a structure of internal multi-junction sub-cell interconnection through laser scribing on the deposited film. The principle is to use specific energy and pulse The frequency laser beam is focused on the film layer that needs to be marked, and the film layer in the radiation area is removed by using physical processes such as thermal effect and thermal stress generated by the interaction between the laser beam and the film layer. The typical manufacturing process of silicon-based thin-film solar cells requires three laser scribing processes, that is, laser scribing of the conductive film layer of the front electrode (called P1 scribing...

AI Technical Summary

Problems solved by technology

[0005] The invention solves the technical problem that the existing laser scribing equipment cannot simultaneously take into account the cost and scribing complex graphics, and at the same time overcomes the problems that the traditional laser scribing equipment produces some particles with smaller diameters during operation, which affects the electrical performance of solar cells, etc.

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