Texture etching solution compositions and texture etching methods for crystalline silicon wafers
A crystalline silicon wafer and texture technology, which is applied to surface etching compositions, chemical instruments and methods, semiconductor devices, etc., can solve the problems of increasing texture quality deviation and worsening uniformity, and achieves economical and uniform effects.
Inactive Publication Date: 2015-09-23
DONGWOO FINE CHEM CO LTD
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Problems solved by technology
However, since the above-mentioned etching solutions respectively include isopropyl alcohol having a relatively low boiling point and this substance must be additionally added during texturing, economical disadvantages are caused in terms of productivity and cost.
In addition, the additionally added isopropanol produces a temperature gradient of the etching solution, which increases the deviation of the texture quality over regions on the silicon wafer surface and ultimately degrades the homogeneity
Method used
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Embodiment 1
[0063] Prepared for Texture etching composition for crystalline silicon wafers.
Embodiment 2 to 17、 comparative Embodiment 1 to comparative Embodiment 4
[0065] The same procedure as described in Example 1 was carried out except for using the components and their contents listed in Table 1 below. Here, the content refers to weight percentage (wt.%).
[0066] Table 1
[0067]
[0068]
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The present invention relates to texture etching solution compositions and texture etching methods for crystalline silicon wafers. The texture etching solution composition for crystalline silicon wafers comprises an alkaline compound; polysaccharide; fatty acid, metal salt of fatty acid or a mixture thereof in an optimum content together with polysaccharide to form uniformly on the surface of crystalline silicon wafer Texture with micro-cone structure to maximize solar energy absorption while reducing light reflection, thus improving luminous efficiency.
Description
technical field [0001] The invention relates to a texture etching composition and a texture etching method for a crystalline silicon wafer, which can uniformly form the surface of the crystalline silicon wafer to have a micro-cone structure, thereby improving luminous efficiency. Background technique [0002] In recent years, solar cells have grown rapidly and are called next-generation energy sources and electronic devices that directly convert clean energy (ie, solar energy) into electrical energy. This solar cell mainly has a P-type silicon semiconductor including silicon and boron added to silicon and includes a PN junction semiconductor substrate, wherein the P-type silicon semiconductor mainly has silicon and boron added to silicon, and the N-type silicon The semiconductor layer is formed by diffusing phosphorus (P) to the surface of a P-type silicon semiconductor. [0003] When light (such as sunlight) irradiates a substrate with an electric field generated through a...
Claims
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IPC IPC(8): C09K13/02C23F1/24H01L21/306
CPCC09K13/06H01L31/02363Y02E10/50C09K13/02C23F1/16H01L21/306
Inventor 洪亨杓李在连林大成
Owner DONGWOO FINE CHEM CO LTD
